Influence of deposition conditions on characteristics of thin-film coatings obtained using high-power ion beams

Vasily K. Struts, Vasily M. Matvienko, Alexandr I. Ryabchikov, Anatoli V. Petrov, Anatoli S. Shlapakovski

Результат исследований: Материалы для книги/типы отчетовМатериалы для конференции

1 Цитирования (Scopus)

Аннотация

The films of titanium and carbon deposited onto silicon and -Fe substrates using high-power ion beams were investigated. The adhesion strength and plasticity of coatings obtained at different deposition conditions have been studied. It has been found that the adhesion strength increases with increasing distance between the substrate and ablated target and with decreasing film thickness determined by a number of accelerator shots. Characteristics of different coatings are compared.

Язык оригиналаАнглийский
Название основной публикации15th International Conference on High-Power Particle Beams - Proceedings, BEAMS-2004
Страницы643-646
Число страниц4
СостояниеОпубликовано - 2004
Событие15th International Conference on High-Power Particle Beams, BEAMS-2004 - St. Petersburg, Российская Федерация
Продолжительность: 18 июл 200423 июл 2004

Другое

Другое15th International Conference on High-Power Particle Beams, BEAMS-2004
СтранаРоссийская Федерация
ГородSt. Petersburg
Период18.7.0423.7.04

ASJC Scopus subject areas

  • Nuclear and High Energy Physics

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