TY - JOUR
T1 - High-frequency short-pulsed metal plasma-immersion ion implantation or deposition using filtered DC vacuum-arc plasma
AU - Ryabchikov, A. I.
AU - Ryabchikov, I. A.
AU - Stepanov, I. B.
AU - Usov, Yury Petrovich
PY - 2007/4/23
Y1 - 2007/4/23
N2 - A new approach to the development of advanced coating deposition and ion implantation method including an application of filtered dc metal plasma and high-frequency short-pulsed negative bias voltage with a duty factor in the range of 10-99% are considered. The ion energy spectrum for different negative bias potential pulse durations (120-1100 ns) was measured. The chart of various methods of ion beam and plasma material treatment using high-frequency short pulse metal plasma immersion ion implantation or deposition depending on bias pulse duty factor and amplitude for Cu plasma is presented. The ion assisted coating deposition has been examined depending on samples conductivity and thickness, plasma concentration, pulse repetition rate, amplitude, and duty factor.
AB - A new approach to the development of advanced coating deposition and ion implantation method including an application of filtered dc metal plasma and high-frequency short-pulsed negative bias voltage with a duty factor in the range of 10-99% are considered. The ion energy spectrum for different negative bias potential pulse durations (120-1100 ns) was measured. The chart of various methods of ion beam and plasma material treatment using high-frequency short pulse metal plasma immersion ion implantation or deposition depending on bias pulse duty factor and amplitude for Cu plasma is presented. The ion assisted coating deposition has been examined depending on samples conductivity and thickness, plasma concentration, pulse repetition rate, amplitude, and duty factor.
KW - Duty factor
KW - Metal plasma
KW - Short-pulsed
UR - http://www.scopus.com/inward/record.url?scp=33847650546&partnerID=8YFLogxK
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U2 - 10.1016/j.surfcoat.2006.09.053
DO - 10.1016/j.surfcoat.2006.09.053
M3 - Article
AN - SCOPUS:33847650546
VL - 201
SP - 6523
EP - 6525
JO - Surface and Coatings Technology
JF - Surface and Coatings Technology
SN - 0257-8972
IS - 15
ER -