The chapter reports on reactive magnetron sputtering of advanced hard nanocomposite coatings. It is divided into three parts. The first part briefly summarizes the present state of the art in the field of hard nanocomposite coatings, including the principle of enhanced hardness. The second part reports on advanced nanocomposite coatings. The following coatings are discussed in detail: (1) hard Si-Zr-O coatings that are thermally stable up to 1400°C; (2) X-ray amorphous a-(Si3N4/MeNx) and a-(Si-B-C-N) coatings that are thermally stable and oxidation resistant up to ~1500°C and ~1700°C, respectively; (3) oxide coatings that protect the substrate against oxidation at high temperatures exceeding 1000°C and are limited by an interaction of the coating with a substrate; (4) hard nanocomposite coatings composed of nanograins dispersed in an amorphous matrix; (5) nc-MeC/a-C composite coatings with low friction and high wear resistance (here, a- and nc- denote the amorphous and nanocrystalline phase, respectively, with Me=Zr, Ti, Ta, W, Mo, Nb, and other elements forming hard carbides); and (6) oxide coatings with enhanced resistance to cracking. The third part is devoted to the present development of hard nanocomposite coatings. The principles of (1) the formation of (a) hard coatings with enhanced toughness and (b) hard nanocomposite coatings on unheated substrates; and (2) a very high reactive deposition of oxide coatings with the deposition rate aD≥1000nmmin-1 are briefly described. Trends of upcoming developments of hard nanocomposite coatings are outlined.
|Название основной публикации||Comprehensive Materials Processing|
|ISBN (печатное издание)||9780080965338|
|Состояние||Опубликовано - 1 мая 2014|
ASJC Scopus subject areas
- Materials Science(all)