Hard a-Si3N4/MeNx nanocomposite coatings with high thermal stability and high oxidation resistance

J. Musil, P. Zeman

Результат исследований: Материалы для книги/типы отчетовМатериалы для конференции

34 Цитирования (Scopus)

Аннотация

This article reports on a new class of amorphous a-Si3N4/MeNx nanocomposite coatings with a high (≥50 vol.%) content of Si3N4 phase; here Me=Zr, Ta, Mo and W. These nanocomposites exhibit high (>1000°C) thermal stability against crystallization and high (>1000 °C) oxidation resistance if the metal Me incorporated in the nanocomposite is correctly selected. It was found that the Zr-Si-N film deposited on Si(100) substrate exhibits no increase of the mass (Δm=0) in thermogravimetric measurements performed in flowing air up to 1300 °C, i.e. up to the temperature that is the thermal limit for Si substrate but not for nanocomposite.

Язык оригиналаАнглийский
Название основной публикацииDesigning of Interfacial Structures in Advanced Materials and their Joints - Proceedings of the Int. Workshop on Designing of Interfacial Structures in Advanced Materials and their Joints, DIS'06
РедакторыMasaaki Naka
ИздательTrans Tech Publications Ltd
Страницы31-36
Число страниц6
ISBN (печатное издание)9783908451334
DOI
СостояниеОпубликовано - 1 янв 2007
СобытиеInternational Workshop on Designing of Interfacial Structures in Advanced Materials and their Joints, DIS 2006 - Osaka, Япония
Продолжительность: 18 мая 200620 мая 2006

Серия публикаций

НазваниеSolid State Phenomena
Том127
ISSN (электронное издание)1662-9779

Конференция

КонференцияInternational Workshop on Designing of Interfacial Structures in Advanced Materials and their Joints, DIS 2006
СтранаЯпония
ГородOsaka
Период18.5.0620.5.06

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Materials Science(all)
  • Condensed Matter Physics

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  • Цитировать

    Musil, J., & Zeman, P. (2007). Hard a-Si3N4/MeNx nanocomposite coatings with high thermal stability and high oxidation resistance. В M. Naka (Ред.), Designing of Interfacial Structures in Advanced Materials and their Joints - Proceedings of the Int. Workshop on Designing of Interfacial Structures in Advanced Materials and their Joints, DIS'06 (стр. 31-36). (Solid State Phenomena; Том 127). Trans Tech Publications Ltd. https://doi.org/10.4028/www.scientific.net/SSP.127.31, https://doi.org/10.4028/3-908451-33-7.31