Hard a-Si3N4/MeNx nanocomposite coatings with high thermal stability and high oxidation resistance

J. Musil, P. Zeman

Результат исследований: Материалы для книги/типы отчетовМатериалы для конференции

31 Цитирования (Scopus)

Выдержка

This article reports on a new class of amorphous a-Si3N4/MeNx nanocomposite coatings with a high (≥50 vol.%) content of Si3N4 phase; here Me=Zr, Ta, Mo and W. These nanocomposites exhibit high (>1000°C) thermal stability against crystallization and high (>1000 °C) oxidation resistance if the metal Me incorporated in the nanocomposite is correctly selected. It was found that the Zr-Si-N film deposited on Si(100) substrate exhibits no increase of the mass (Δm=0) in thermogravimetric measurements performed in flowing air up to 1300 °C, i.e. up to the temperature that is the thermal limit for Si substrate but not for nanocomposite.

Язык оригиналаАнглийский
Название основной публикацииDesigning of Interfacial Structures in Advanced Materials and their Joints - Proceedings of the Int. Workshop on Designing of Interfacial Structures in Advanced Materials and their Joints, DIS'06
РедакторыMasaaki Naka
ИздательTrans Tech Publications Ltd
Страницы31-36
Число страниц6
ISBN (печатное издание)9783908451334
DOI
СостояниеОпубликовано - 1 янв 2007
СобытиеInternational Workshop on Designing of Interfacial Structures in Advanced Materials and their Joints, DIS 2006 - Osaka, Япония
Продолжительность: 18 мая 200620 мая 2006

Серия публикаций

НазваниеSolid State Phenomena
Том127
ISSN (электронное издание)1662-9779

Конференция

КонференцияInternational Workshop on Designing of Interfacial Structures in Advanced Materials and their Joints, DIS 2006
СтранаЯпония
ГородOsaka
Период18.5.0620.5.06

Отпечаток

oxidation resistance
Oxidation resistance
Nanocomposites
nanocomposites
Thermodynamic stability
thermal stability
coatings
Coatings
Substrates
Crystallization
Metals
crystallization
silicon nitride
air
Air
metals
Temperature
temperature

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Materials Science(all)
  • Condensed Matter Physics

Цитировать

Musil, J., & Zeman, P. (2007). Hard a-Si3N4/MeNx nanocomposite coatings with high thermal stability and high oxidation resistance. В M. Naka (Ред.), Designing of Interfacial Structures in Advanced Materials and their Joints - Proceedings of the Int. Workshop on Designing of Interfacial Structures in Advanced Materials and their Joints, DIS'06 (стр. 31-36). (Solid State Phenomena; Том 127). Trans Tech Publications Ltd. https://doi.org/10.4028/www.scientific.net/SSP.127.31, https://doi.org/10.4028/3-908451-33-7.31

Hard a-Si3N4/MeNx nanocomposite coatings with high thermal stability and high oxidation resistance. / Musil, J.; Zeman, P.

Designing of Interfacial Structures in Advanced Materials and their Joints - Proceedings of the Int. Workshop on Designing of Interfacial Structures in Advanced Materials and their Joints, DIS'06. ред. / Masaaki Naka. Trans Tech Publications Ltd, 2007. стр. 31-36 (Solid State Phenomena; Том 127).

Результат исследований: Материалы для книги/типы отчетовМатериалы для конференции

Musil, J & Zeman, P 2007, Hard a-Si3N4/MeNx nanocomposite coatings with high thermal stability and high oxidation resistance. в M Naka (ред.), Designing of Interfacial Structures in Advanced Materials and their Joints - Proceedings of the Int. Workshop on Designing of Interfacial Structures in Advanced Materials and their Joints, DIS'06. Solid State Phenomena, том. 127, Trans Tech Publications Ltd, стр. 31-36, Osaka, Япония, 18.5.06. https://doi.org/10.4028/www.scientific.net/SSP.127.31, https://doi.org/10.4028/3-908451-33-7.31
Musil J, Zeman P. Hard a-Si3N4/MeNx nanocomposite coatings with high thermal stability and high oxidation resistance. В Naka M, редактор, Designing of Interfacial Structures in Advanced Materials and their Joints - Proceedings of the Int. Workshop on Designing of Interfacial Structures in Advanced Materials and their Joints, DIS'06. Trans Tech Publications Ltd. 2007. стр. 31-36. (Solid State Phenomena). https://doi.org/10.4028/www.scientific.net/SSP.127.31, https://doi.org/10.4028/3-908451-33-7.31
Musil, J. ; Zeman, P. / Hard a-Si3N4/MeNx nanocomposite coatings with high thermal stability and high oxidation resistance. Designing of Interfacial Structures in Advanced Materials and their Joints - Proceedings of the Int. Workshop on Designing of Interfacial Structures in Advanced Materials and their Joints, DIS'06. редактор / Masaaki Naka. Trans Tech Publications Ltd, 2007. стр. 31-36 (Solid State Phenomena).
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