Formation of bioactive coatings by radio frequency magnetron sputtering using various calcium phosphate targets and working gases

Результат исследований: Материалы для журнала

Аннотация

The influence of working gas and the sputtered target composition on physico-chemical properties and the deposition rate of the coatings formed by radio frequency magnetron sputtering was studied. The deposition rate of the CaP coatings formed by sputtering of the HA target in Ar and Kr is greater than that of coatings formed in Xe. Strontium substitutions in the composition of β-tricalcium phosphate targets lead to the increase in deposition rate. Magnesium ones slightly decrease it.

Язык оригиналаАнглийский
Номер статьи012016
ЖурналJournal of Physics: Conference Series
Том1281
Номер выпуска1
DOI
СостояниеОпубликовано - 12 авг 2019
Событие14th International Conference on Films and Coatings, ICFC 2019 - Saint Petersburg, Российская Федерация
Продолжительность: 14 мая 201916 мая 2019

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ASJC Scopus subject areas

  • Physics and Astronomy(all)

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