Аннотация
The influence of working gas and the sputtered target composition on physico-chemical properties and the deposition rate of the coatings formed by radio frequency magnetron sputtering was studied. The deposition rate of the CaP coatings formed by sputtering of the HA target in Ar and Kr is greater than that of coatings formed in Xe. Strontium substitutions in the composition of β-tricalcium phosphate targets lead to the increase in deposition rate. Magnesium ones slightly decrease it.
| Язык оригинала | Английский |
|---|---|
| Номер статьи | 012016 |
| Журнал | Journal of Physics: Conference Series |
| Том | 1281 |
| Номер выпуска | 1 |
| DOI | |
| Состояние | Опубликовано - 12 авг 2019 |
| Событие | 14th International Conference on Films and Coatings, ICFC 2019 - Saint Petersburg, Российская Федерация Продолжительность: 14 мая 2019 → 16 мая 2019 |
ASJC Scopus subject areas
- Physics and Astronomy(all)
Fingerprint Подробные сведения о темах исследования «Formation of bioactive coatings by radio frequency magnetron sputtering using various calcium phosphate targets and working gases». Вместе они формируют уникальный семантический отпечаток (fingerprint).
Цитировать
Fedotkin, A. Y., Kozelskaya, A. I., & Tverdokhlebov, S. I. (2019). Formation of bioactive coatings by radio frequency magnetron sputtering using various calcium phosphate targets and working gases. Journal of Physics: Conference Series, 1281(1), [012016]. https://doi.org/10.1088/1742-6596/1281/1/012016