Formation of bioactive coatings by radio frequency magnetron sputtering using various calcium phosphate targets and working gases

A. Y. Fedotkin, A. I. Kozelskaya, S. I. Tverdokhlebov

Научно-образовательный центр Б.П. Вейнберга

Результат исследований: Материалы для журнала

Аннотация

The influence of working gas and the sputtered target composition on physico-chemical properties and the deposition rate of the coatings formed by radio frequency magnetron sputtering was studied. The deposition rate of the CaP coatings formed by sputtering of the HA target in Ar and Kr is greater than that of coatings formed in Xe. Strontium substitutions in the composition of β-tricalcium phosphate targets lead to the increase in deposition rate. Magnesium ones slightly decrease it.

Язык оригинала	Английский
Номер статьи	012016
Журнал	Journal of Physics: Conference Series
Том	1281
Номер выпуска	1
DOI	https://doi.org/10.1088/1742-6596/1281/1/012016
Состояние	Опубликовано - 12 авг 2019
Событие	14th International Conference on Films and Coatings, ICFC 2019 - Saint Petersburg, Российская Федерация Продолжительность: 14 мая 2019 → 16 мая 2019

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ASJC Scopus subject areas

Physics and Astronomy(all)

Цитировать

Fedotkin, A. Y., Kozelskaya, A. I., & Tverdokhlebov, S. I. (2019). Formation of bioactive coatings by radio frequency magnetron sputtering using various calcium phosphate targets and working gases. Journal of Physics: Conference Series, 1281(1), [012016]. https://doi.org/10.1088/1742-6596/1281/1/012016

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N2 - The influence of working gas and the sputtered target composition on physico-chemical properties and the deposition rate of the coatings formed by radio frequency magnetron sputtering was studied. The deposition rate of the CaP coatings formed by sputtering of the HA target in Ar and Kr is greater than that of coatings formed in Xe. Strontium substitutions in the composition of β-tricalcium phosphate targets lead to the increase in deposition rate. Magnesium ones slightly decrease it.

AB - The influence of working gas and the sputtered target composition on physico-chemical properties and the deposition rate of the coatings formed by radio frequency magnetron sputtering was studied. The deposition rate of the CaP coatings formed by sputtering of the HA target in Ar and Kr is greater than that of coatings formed in Xe. Strontium substitutions in the composition of β-tricalcium phosphate targets lead to the increase in deposition rate. Magnesium ones slightly decrease it.

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VL - 1281

JO - Journal of Physics: Conference Series

JF - Journal of Physics: Conference Series

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T2 - 14th International Conference on Films and Coatings, ICFC 2019

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Доступ к документу

10.1088/1742-6596/1281/1/012016