TY - JOUR
T1 - Formation of bioactive coatings by radio frequency magnetron sputtering using various calcium phosphate targets and working gases
AU - Fedotkin, A. Y.
AU - Kozelskaya, A. I.
AU - Tverdokhlebov, S. I.
PY - 2019/8/12
Y1 - 2019/8/12
N2 - The influence of working gas and the sputtered target composition on physico-chemical properties and the deposition rate of the coatings formed by radio frequency magnetron sputtering was studied. The deposition rate of the CaP coatings formed by sputtering of the HA target in Ar and Kr is greater than that of coatings formed in Xe. Strontium substitutions in the composition of β-tricalcium phosphate targets lead to the increase in deposition rate. Magnesium ones slightly decrease it.
AB - The influence of working gas and the sputtered target composition on physico-chemical properties and the deposition rate of the coatings formed by radio frequency magnetron sputtering was studied. The deposition rate of the CaP coatings formed by sputtering of the HA target in Ar and Kr is greater than that of coatings formed in Xe. Strontium substitutions in the composition of β-tricalcium phosphate targets lead to the increase in deposition rate. Magnesium ones slightly decrease it.
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U2 - 10.1088/1742-6596/1281/1/012016
DO - 10.1088/1742-6596/1281/1/012016
M3 - Conference article
AN - SCOPUS:85072201685
VL - 1281
JO - Journal of Physics: Conference Series
JF - Journal of Physics: Conference Series
SN - 1742-6588
IS - 1
M1 - 012016
T2 - 14th International Conference on Films and Coatings, ICFC 2019
Y2 - 14 May 2019 through 16 May 2019
ER -