Formation of a Track Template during PETP Irradiation with High-Energy Helium Ions for the Template Synthesis of Regular Microstructures

Результат исследований: Материалы для журналаСтатьярецензирование

1 Цитирования (Scopus)

Аннотация

The features of obtaining track membranes (TMs) with the help of a classical cyclotron situated at Tomsk Polytechnic University are discussed. It is demonstrated that TMs can be employed as templates. The results of research into columnar nanostructures formed with the help of a TM template are presented. The creation of regular microstructures is investigated using deep X-ray lithography with synchrotron radiation and templates made of track membranes.

Язык оригиналаАнглийский
Страницы (с-по)598-602
Число страниц5
ЖурналJournal of Surface Investigation
Том12
Номер выпуска3
DOI
СостояниеОпубликовано - 1 мая 2018

ASJC Scopus subject areas

  • Surfaces, Coatings and Films

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