Flexible hydrophobic ZrN nitride films

J. Musil, S. Zenkin, Kos, R. Čerstvý, S. Haviar

Исследовательская школа физики высокоэнергетических процессов

Результат исследований: Материалы для журнала › Статья › рецензирование

Аннотация

This article reports on formation of flexible hydrophobic ZrN films with enhanced resistance to cracking prepared by reactive magnetron sputtering. It is shown that (1) the hydrophobicity of the ZrN films is their intrinsic property and all sputtered ZrN films are hydrophobic and (2) the flexibility of the ZrN films with enhanced resistance to cracking is achieved by an optimization of their mechanical properties only. The flexible ZrN films are typical representatives of carbon-free low-electronegativity metal compounds.

Язык оригинала	Английский
Страницы (с-по)	34-38
Число страниц	5
Журнал	Vacuum
Том	131
DOI	https://doi.org/10.1016/j.vacuum.2016.05.020
Состояние	Опубликовано - 1 сен 2016

ASJC Scopus subject areas

Instrumentation
Condensed Matter Physics
Surfaces, Coatings and Films

Доступ к документу

10.1016/j.vacuum.2016.05.020

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KW - Nitride

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