Flexible hydrophobic ZrN nitride films

J. Musil, S. Zenkin, Kos, R. Čerstvý, S. Haviar

Результат исследований: Материалы для журналаСтатьярецензирование

16 Цитирования (Scopus)

Аннотация

This article reports on formation of flexible hydrophobic ZrN films with enhanced resistance to cracking prepared by reactive magnetron sputtering. It is shown that (1) the hydrophobicity of the ZrN films is their intrinsic property and all sputtered ZrN films are hydrophobic and (2) the flexibility of the ZrN films with enhanced resistance to cracking is achieved by an optimization of their mechanical properties only. The flexible ZrN films are typical representatives of carbon-free low-electronegativity metal compounds.

Язык оригиналаАнглийский
Страницы (с-по)34-38
Число страниц5
ЖурналVacuum
Том131
DOI
СостояниеОпубликовано - 1 сен 2016

ASJC Scopus subject areas

  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films

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