Experimental setup for investigation of the pseudospark discharge as applied to generation of EUV radiation

Yu D. Korolev, I. M. Datsko, O. B. Frants, V. G. Geyman, R. V. Ivashov, N. V. Landl, I. A. Shemyakin

    Результат исследований: Материалы для книги/типы отчетовМатериалы для конференции

    2 Цитирования (Scopus)

    Выдержка

    The paper describes the main features of the experimental installation for investigation of a high current pulsed gas discharge, which burns in typical conditions of EUV source operation.

    Язык оригиналаАнглийский
    Название основной публикацииBEAMS 2002 - 14th International Conference on High-Power Particle Beams
    Страницы157-160
    Число страниц4
    Том2
    СостояниеОпубликовано - 2002
    Событие14th International Conference on High-Power Particle Beams, BEAMS 2002 and the 5th International Conference on Dense Z-Pinches, DZP 2002 - Albuquerque, NM, Соединенные Штаты Америки
    Продолжительность: 23 июн 200228 июн 2002

    Другое

    Другое14th International Conference on High-Power Particle Beams, BEAMS 2002 and the 5th International Conference on Dense Z-Pinches, DZP 2002
    СтранаСоединенные Штаты Америки
    ГородAlbuquerque, NM
    Период23.6.0228.6.02

    Отпечаток

    burn-in
    gas discharges
    installing
    high current
    radiation

    ASJC Scopus subject areas

    • Nuclear and High Energy Physics

    Цитировать

    Korolev, Y. D., Datsko, I. M., Frants, O. B., Geyman, V. G., Ivashov, R. V., Landl, N. V., & Shemyakin, I. A. (2002). Experimental setup for investigation of the pseudospark discharge as applied to generation of EUV radiation. В BEAMS 2002 - 14th International Conference on High-Power Particle Beams (Том 2, стр. 157-160). [6219534]

    Experimental setup for investigation of the pseudospark discharge as applied to generation of EUV radiation. / Korolev, Yu D.; Datsko, I. M.; Frants, O. B.; Geyman, V. G.; Ivashov, R. V.; Landl, N. V.; Shemyakin, I. A.

    BEAMS 2002 - 14th International Conference on High-Power Particle Beams. Том 2 2002. стр. 157-160 6219534.

    Результат исследований: Материалы для книги/типы отчетовМатериалы для конференции

    Korolev, YD, Datsko, IM, Frants, OB, Geyman, VG, Ivashov, RV, Landl, NV & Shemyakin, IA 2002, Experimental setup for investigation of the pseudospark discharge as applied to generation of EUV radiation. в BEAMS 2002 - 14th International Conference on High-Power Particle Beams. том. 2, 6219534, стр. 157-160, Albuquerque, NM, Соединенные Штаты Америки, 23.6.02.
    Korolev YD, Datsko IM, Frants OB, Geyman VG, Ivashov RV, Landl NV и соавт. Experimental setup for investigation of the pseudospark discharge as applied to generation of EUV radiation. В BEAMS 2002 - 14th International Conference on High-Power Particle Beams. Том 2. 2002. стр. 157-160. 6219534
    Korolev, Yu D. ; Datsko, I. M. ; Frants, O. B. ; Geyman, V. G. ; Ivashov, R. V. ; Landl, N. V. ; Shemyakin, I. A. / Experimental setup for investigation of the pseudospark discharge as applied to generation of EUV radiation. BEAMS 2002 - 14th International Conference on High-Power Particle Beams. Том 2 2002. стр. 157-160
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    title = "Experimental setup for investigation of the pseudospark discharge as applied to generation of EUV radiation",
    abstract = "The paper describes the main features of the experimental installation for investigation of a high current pulsed gas discharge, which burns in typical conditions of EUV source operation.",
    author = "Korolev, {Yu D.} and Datsko, {I. M.} and Frants, {O. B.} and Geyman, {V. G.} and Ivashov, {R. V.} and Landl, {N. V.} and Shemyakin, {I. A.}",
    year = "2002",
    language = "English",
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    volume = "2",
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    AU - Korolev, Yu D.

    AU - Datsko, I. M.

    AU - Frants, O. B.

    AU - Geyman, V. G.

    AU - Ivashov, R. V.

    AU - Landl, N. V.

    AU - Shemyakin, I. A.

    PY - 2002

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