Erosion of the GaAs target under irradiation by a high-power pulsed ion beam

Li Tszen Fen, G. E. Remnev, M. S. Saltymakov, V. I. Gusel'nikov, V. A. Makeev, I. V. Ivonin, E. P. Naiden, V. I. Yurchenko

Результат исследований: Материалы для журналаСтатья

Аннотация

The results of examination of the GaAs-target erosion under irradiation by a high-power pulsed ion beam are reported. In the experiments, use was made of a high-power pulsed ion source with the following parameters: ion energy - 250 keV, target current density - 350 A/cm2, pulse duration - 80 ns, target energy density - up to 7 J/cm2. The target erosion coefficient and its dependence on the number of successive pulses are measured. It is found that the surface roughness parameter is increased with the number of successive beam pulses. A regular structure of surface relief is observed to form in the case where the number of pulses > 20-40.

Язык оригиналаАнглийский
Страницы (с-по)66-70
Число страниц5
ЖурналRussian Physics Journal
Том50
Номер выпуска1
DOI
СостояниеОпубликовано - янв 2007

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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    Fen, L. T., Remnev, G. E., Saltymakov, M. S., Gusel'nikov, V. I., Makeev, V. A., Ivonin, I. V., Naiden, E. P., & Yurchenko, V. I. (2007). Erosion of the GaAs target under irradiation by a high-power pulsed ion beam. Russian Physics Journal, 50(1), 66-70. https://doi.org/10.1007/s11182-007-0007-6