Effects of substrate ion bombardment on characteristics of vacuum-arc plasma deposited hard coatings

V. Braic, D. Pavelescu, M. Balaceanu, C. N. Zoita, M. Braic, A. Kiss, A. Vladescu

Результат исследований: Материалы для книги/типы отчетовМатериалы для конференции

Аннотация

This work aims to investigate the influence of the energy and flux of the ions striking the substrate on the characteristics of the ZrCN coatings deposited by cathodic arc method. The coatings were investigated for elemental and phase composition, chemical binding state, texture, residual stress, hardness, adhesion and tribological behavior using GDOS, Raman spectroscopy and XRD techniques, surface profilometry, hardness and scratch adhesion measurements, and tribological tests. Various substrate current densities (in the range 2-7 mA/cm2) were obtained by using 1 or 2 cathodes, while different ion energies resulted from the variation of the substrate negative bias voltage (in the range 50 - 200 V). Chemical bonds, texture, mechanical and tribological characteristics of the films were observed to strongly depend on the ion bombardment conditions. The dominant factor in achieving high hardness values (in excess of 40 GPa) and superior wear resistance was found to be the substrate current density.

Язык оригиналаАнглийский
Название основной публикацииISDEIV 2008 - Proceedings of the 23rd International Symposium on Discharges and Electrical Insulation in Vacuum
Страницы503-506
Число страниц4
DOI
СостояниеОпубликовано - 29 дек 2008
Опубликовано для внешнего пользованияДа
Событие23rd International Symposium on Discharges and Electrical Insulation in Vacuum, 23rd ISDEIV - Bucharest, Румыния
Продолжительность: 15 сен 200819 сен 2008

Серия публикаций

НазваниеProceedings - International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV
Том2
ISSN (печатное издание)1093-2941

Конференция

Конференция23rd International Symposium on Discharges and Electrical Insulation in Vacuum, 23rd ISDEIV
СтранаРумыния
ГородBucharest
Период15.9.0819.9.08

ASJC Scopus subject areas

  • Computer Networks and Communications
  • Software

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  • Цитировать

    Braic, V., Pavelescu, D., Balaceanu, M., Zoita, C. N., Braic, M., Kiss, A., & Vladescu, A. (2008). Effects of substrate ion bombardment on characteristics of vacuum-arc plasma deposited hard coatings. В ISDEIV 2008 - Proceedings of the 23rd International Symposium on Discharges and Electrical Insulation in Vacuum (стр. 503-506). [4676840] (Proceedings - International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV; Том 2). https://doi.org/10.1109/DEIV.2008.4676840