Effect of working gas on the deposition rate of CaP coatings formed by radio frequency magnetron sputtering of a hydroxyapatite target

Результат исследований: Материалы для журнала

Аннотация

This study is dedicated to the influence of the inert working gas on the deposition rate of CaP coatings formed by radio frequency magnetron sputtering of a hydroxyapatite target in Ar, Kr and Xe. The optical emission spectra of plasma, the elemental and phase composition of the formed coatings are investigated. The deposition rates of the CaP coatings formed in Ar and Kr are approximately comparable and higher than ones formed in Xe.

Язык оригиналаАнглийский
Номер статьи012018
ЖурналJournal of Physics: Conference Series
Том1313
Номер выпуска1
DOI
СостояниеОпубликовано - 12 сен 2019
Событие26th International Conference on Vacuum Technique and Technology, VTT 2019 - Saint Petersburg, Российская Федерация
Продолжительность: 18 июн 201920 июн 2019

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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