Effect of the anisotropy of monocrystalline silicon mechanical properties on the dynamic characteristics of a micromechanical gyroscope

Результат исследования: Материалы для книги/типы отчетовМатериалы для конференции

3 Цитирования (Scopus)

Аннотация

The aim of the research was to determine the effect of temperature on mechanical properties of a micromechanical gyroscope with the sensing element mounted on a silicon wafer, with the crystallographic orientation of (100) (110) (111). The research is of current relevancy since the metrological characteristics that depend on the eigenfrequencies over the full temperature range are to be controlled. The temperature-modal analysis of the micromechanical gyroscope model was performed with ANSYS program. The temperature dependence for eigenfrequencies was obtained. The dependence of the scale factor on temperature for the most temperature-independent variant of sensor positioning on the wafer was determined. The developed mathematical model was used to find the forms of the output oscillations of the gyroscope.

Язык оригиналаАнглийский
Заголовок главной публикацииIOP Conference Series: Materials Science and Engineering
ИздательInstitute of Physics Publishing
Том81
Редакция1
DOI
Статус публикацииОпубликовано - 23 апр 2015
СобытиеInternational Scientific Conference on Radiation-Thermal Effects and Processes in Inorganic Materials, RTEP 2014 - Tomsk, Российская Федерация
Длительность: 3 ноя 20148 ноя 2014

Другое

ДругоеInternational Scientific Conference on Radiation-Thermal Effects and Processes in Inorganic Materials, RTEP 2014
СтранаРоссийская Федерация
ГородTomsk
Период3.11.148.11.14

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ASJC Scopus subject areas

  • Engineering(all)
  • Materials Science(all)

Цитировать

Nesterenko, T. G., Vtorushin, S. E., Barbin, E. S., & Koleda, AN. (2015). Effect of the anisotropy of monocrystalline silicon mechanical properties on the dynamic characteristics of a micromechanical gyroscope. В IOP Conference Series: Materials Science and Engineering (1 ред., Том 81). [012096] Institute of Physics Publishing. https://doi.org/10.1088/1757-899X/81/1/012096