Effect of magnetron deposition conditions on the structure, phase composition and properties of the coatings on the basis of the Al-Si-N system

I. A. Bozhko, E. V. Rybalko, M. V. Fedorischeva, V. P. Sergeev

Результат исследований: Материалы для книги/типы отчетовМатериалы для конференции

2 Цитирования (Scopus)

Аннотация

Coatings on the basis of Al-Si-N system produced by the pulsed magnetron sputtering at different temperatures of the KV quartz glass substrate were carried out. It has been established by the X-ray analysis, that the composite coatings of the Al-Si-N system contain the AlN (hcp), α-Si3N4 and β-Si3N4 phases, whose ratio depends on the temperature of the substrate during the deposition. Investigation of the optical properties has shown that the transmittance for all coatings is ∼75-85%. The protective coatings of the Al-Si-N system produced by the pulsed magnetron deposition are characterized by high nanohardness values (∼27 GPa) along with high values of the elastic recovery coefficient (Re ≥ 0.70).

Язык оригиналаАнглийский
Название основной публикацииProceedings of the International Conference on Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2017, AMHS 2017
ИздательAmerican Institute of Physics Inc.
Том1909
ISBN (электронное издание)9780735416017
DOI
СостояниеОпубликовано - 1 дек 2017
СобытиеInternational Conference on Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2017, AMHS 2017 - Tomsk, Российская Федерация
Продолжительность: 9 окт 201713 окт 2017

Конференция

КонференцияInternational Conference on Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2017, AMHS 2017
СтранаРоссийская Федерация
ГородTomsk
Период9.10.1713.10.17

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ASJC Scopus subject areas

  • Physics and Astronomy(all)

Цитировать

Bozhko, I. A., Rybalko, E. V., Fedorischeva, M. V., & Sergeev, V. P. (2017). Effect of magnetron deposition conditions on the structure, phase composition and properties of the coatings on the basis of the Al-Si-N system. В Proceedings of the International Conference on Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2017, AMHS 2017 (Том 1909). [020020] American Institute of Physics Inc.. https://doi.org/10.1063/1.5013701