Development of solid surface modification technologies on the base of magnetron plasma sources in Nuclear Physics Institute of Tomsk Polytechnic University

P. Ananin, O. Asainov, G. Bleikher, S. Zubarev, L. Kositsyn, V. Krivibokov, O. Kuzmin, V. Legostaev, A. Padusenko, O. Paschenko, D. Rychkov, S. Yanin

Результат исследований: Материалы для книги/типы отчетовМатериалы для конференции

Аннотация

Research was carried out aiming at development of technologies and industrial scale equipment for processing of large area sheet materials using magnetron sputtering systems (MSS). The properties of MSS with cylindrical and planar diodes, and with cathodes made from various materials, were investigated. The problems of their calculation and design, volt-ampere characteristics, emissive properties, and role of gas medium, were studied. Magnetic field parameter optimization, heat injection and thermal protection of cathodes, spatial heterogeneity of particle flow, were analyzed. Studies of deposited coating properties were carried out in parallel: rate of deposition, adhesion to substrate, optical characteristics. Optimal deposition modes for formation of technical and household mirrors, colored sheet glasses, preparation of metal, oxide, nitride and oxide-nitride coatings, were found. Multilayer optical deposition technology was worked out. In particular, hard heat preserving coatings were obtained. They are transparent in the visible optical range and reflect up to 90% in the infrared. On the basis of these results, some variants of industrial scale technologies and MSS plants were developed and manufactured.

Язык оригиналаАнглийский
Название основной публикацииProceedings - KORUS 2000: 4th Korea-Russia International Symposium on Science and Technology
ИздательInstitute of Electrical and Electronics Engineers Inc.
Страницы215-219
Число страниц5
Том3
ISBN (печатное издание)0780364864, 9780780364868
DOI
СостояниеОпубликовано - 2000
Событие4th Korea-Russia International Symposium on Science and Technology, KORUS 2000 - Ulsan, Республика Корея
Продолжительность: 27 июн 20001 июл 2000

Другое

Другое4th Korea-Russia International Symposium on Science and Technology, KORUS 2000
СтранаРеспублика Корея
ГородUlsan
Период27.6.001.7.00

ASJC Scopus subject areas

  • Clinical Biochemistry
  • Computer Networks and Communications
  • Biotechnology
  • Civil and Structural Engineering
  • Mechanics of Materials
  • Electronic, Optical and Magnetic Materials
  • Materials Chemistry
  • Surfaces, Coatings and Films

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