Аннотация
In this paper, the results of measurements of nickel coating thickness are presented. Ni coatings were deposited onto zirconium alloy Zr-1Nb and Si wafers by dc magnetron sputtering. The thickness of Ni coatings was measured by scanning electron microscopy (SEM), ball abrasion method and non-destructive X-ray diffraction (XRD) method. The developed technique of determination of coating uniformity by grazing incidence XRD method was shown. The estimation of uniformity of Ni coatings with a thickness from 0.5 to 2 μm was performed. The distribution map of the coating thickness over surface of 20×20 mm was constructed. The deposited coating with higher thickness of 2 μm has 10% deviation of thickness.
Язык оригинала | Английский |
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Название основной публикации | Prospects of Fundamental Sciences Development, PFSD 2017 - Proceedings of the XIV International Conference of Students and Young Scientists |
Издатель | American Institute of Physics Inc. |
Том | 1899 |
ISBN (электронное издание) | 9780735415874 |
DOI | |
Состояние | Опубликовано - 3 ноя 2017 |
Событие | 14th International Conference of Students and Young Scientists on Prospects of Fundamental Sciences Development, PFSD 2017 - Tomsk, Российская Федерация Продолжительность: 25 апр 2017 → 28 апр 2017 |
Конференция
Конференция | 14th International Conference of Students and Young Scientists on Prospects of Fundamental Sciences Development, PFSD 2017 |
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Страна | Российская Федерация |
Город | Tomsk |
Период | 25.4.17 → 28.4.17 |
ASJC Scopus subject areas
- Physics and Astronomy(all)