Determination of thickness uniformity of nickel coatings deposited on zirconium alloy by magnetron sputtering

Jingwen Qiao, Anna Bezmaternykh, Dmitry Sednev

Результат исследований: Материалы для книги/типы отчетовМатериалы для конференции

1 Цитирования (Scopus)

Аннотация

In this paper, the results of measurements of nickel coating thickness are presented. Ni coatings were deposited onto zirconium alloy Zr-1Nb and Si wafers by dc magnetron sputtering. The thickness of Ni coatings was measured by scanning electron microscopy (SEM), ball abrasion method and non-destructive X-ray diffraction (XRD) method. The developed technique of determination of coating uniformity by grazing incidence XRD method was shown. The estimation of uniformity of Ni coatings with a thickness from 0.5 to 2 μm was performed. The distribution map of the coating thickness over surface of 20×20 mm was constructed. The deposited coating with higher thickness of 2 μm has 10% deviation of thickness.

Язык оригиналаАнглийский
Название основной публикацииProspects of Fundamental Sciences Development, PFSD 2017 - Proceedings of the XIV International Conference of Students and Young Scientists
ИздательAmerican Institute of Physics Inc.
Том1899
ISBN (электронное издание)9780735415874
DOI
СостояниеОпубликовано - 3 ноя 2017
Событие14th International Conference of Students and Young Scientists on Prospects of Fundamental Sciences Development, PFSD 2017 - Tomsk, Российская Федерация
Продолжительность: 25 апр 201728 апр 2017

Конференция

Конференция14th International Conference of Students and Young Scientists on Prospects of Fundamental Sciences Development, PFSD 2017
СтранаРоссийская Федерация
ГородTomsk
Период25.4.1728.4.17

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ASJC Scopus subject areas

  • Physics and Astronomy(all)

Цитировать

Qiao, J., Bezmaternykh, A., & Sednev, D. (2017). Determination of thickness uniformity of nickel coatings deposited on zirconium alloy by magnetron sputtering. В Prospects of Fundamental Sciences Development, PFSD 2017 - Proceedings of the XIV International Conference of Students and Young Scientists (Том 1899). [040008] American Institute of Physics Inc.. https://doi.org/10.1063/1.5009863