Determination of thickness uniformity of nickel coatings deposited on zirconium alloy by magnetron sputtering

Аннотация

In this paper, the results of measurements of nickel coating thickness are presented. Ni coatings were deposited onto zirconium alloy Zr-1Nb and Si wafers by dc magnetron sputtering. The thickness of Ni coatings was measured by scanning electron microscopy (SEM), ball abrasion method and non-destructive X-ray diffraction (XRD) method. The developed technique of determination of coating uniformity by grazing incidence XRD method was shown. The estimation of uniformity of Ni coatings with a thickness from 0.5 to 2 μm was performed. The distribution map of the coating thickness over surface of 20×20 mm was constructed. The deposited coating with higher thickness of 2 μm has 10% deviation of thickness.

Язык оригинала	Английский
Название основной публикации	Prospects of Fundamental Sciences Development, PFSD 2017 - Proceedings of the XIV International Conference of Students and Young Scientists
Издатель	American Institute of Physics Inc.
Том	1899
ISBN (электронное издание)	9780735415874
DOI	https://doi.org/10.1063/1.5009863
Состояние	Опубликовано - 3 ноя 2017
Событие	14th International Conference of Students and Young Scientists on Prospects of Fundamental Sciences Development, PFSD 2017 - Tomsk, Российская Федерация Продолжительность: 25 апр 2017 → 28 апр 2017

Конференция

Конференция	14th International Conference of Students and Young Scientists on Prospects of Fundamental Sciences Development, PFSD 2017
Страна	Российская Федерация
Город	Tomsk
Период	25.4.17 → 28.4.17

ASJC Scopus subject areas

Physics and Astronomy(all)

Доступ к документу

10.1063/1.5009863

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Цитировать

Qiao, J., Bezmaternykh, A., & Sednev, D. (2017). Determination of thickness uniformity of nickel coatings deposited on zirconium alloy by magnetron sputtering. В Prospects of Fundamental Sciences Development, PFSD 2017 - Proceedings of the XIV International Conference of Students and Young Scientists (Том 1899). [040008] American Institute of Physics Inc.. https://doi.org/10.1063/1.5009863

Determination of thickness uniformity of nickel coatings deposited on zirconium alloy by magnetron sputtering. / Qiao, Jingwen; Bezmaternykh, Anna; Sednev, Dmitry.

Prospects of Fundamental Sciences Development, PFSD 2017 - Proceedings of the XIV International Conference of Students and Young Scientists. Том 1899 American Institute of Physics Inc., 2017. 040008.

Результат исследований: Материалы для книги/типы отчетов › Материалы для конференции

Qiao, J, Bezmaternykh, A & Sednev, D 2017, Determination of thickness uniformity of nickel coatings deposited on zirconium alloy by magnetron sputtering. в Prospects of Fundamental Sciences Development, PFSD 2017 - Proceedings of the XIV International Conference of Students and Young Scientists. том. 1899, 040008, American Institute of Physics Inc., 14th International Conference of Students and Young Scientists on Prospects of Fundamental Sciences Development, PFSD 2017, Tomsk, Российская Федерация, 25.4.17. https://doi.org/10.1063/1.5009863

Qiao J, Bezmaternykh A, Sednev D. Determination of thickness uniformity of nickel coatings deposited on zirconium alloy by magnetron sputtering. В Prospects of Fundamental Sciences Development, PFSD 2017 - Proceedings of the XIV International Conference of Students and Young Scientists. Том 1899. American Institute of Physics Inc. 2017. 040008 https://doi.org/10.1063/1.5009863

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abstract = "In this paper, the results of measurements of nickel coating thickness are presented. Ni coatings were deposited onto zirconium alloy Zr-1Nb and Si wafers by dc magnetron sputtering. The thickness of Ni coatings was measured by scanning electron microscopy (SEM), ball abrasion method and non-destructive X-ray diffraction (XRD) method. The developed technique of determination of coating uniformity by grazing incidence XRD method was shown. The estimation of uniformity of Ni coatings with a thickness from 0.5 to 2 μm was performed. The distribution map of the coating thickness over surface of 20×20 mm was constructed. The deposited coating with higher thickness of 2 μm has 10% deviation of thickness.",

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AB - In this paper, the results of measurements of nickel coating thickness are presented. Ni coatings were deposited onto zirconium alloy Zr-1Nb and Si wafers by dc magnetron sputtering. The thickness of Ni coatings was measured by scanning electron microscopy (SEM), ball abrasion method and non-destructive X-ray diffraction (XRD) method. The developed technique of determination of coating uniformity by grazing incidence XRD method was shown. The estimation of uniformity of Ni coatings with a thickness from 0.5 to 2 μm was performed. The distribution map of the coating thickness over surface of 20×20 mm was constructed. The deposited coating with higher thickness of 2 μm has 10% deviation of thickness.

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