Выдержка
In this paper, the results of measurements of nickel coating thickness are presented. Ni coatings were deposited onto zirconium alloy Zr-1Nb and Si wafers by dc magnetron sputtering. The thickness of Ni coatings was measured by scanning electron microscopy (SEM), ball abrasion method and non-destructive X-ray diffraction (XRD) method. The developed technique of determination of coating uniformity by grazing incidence XRD method was shown. The estimation of uniformity of Ni coatings with a thickness from 0.5 to 2 μm was performed. The distribution map of the coating thickness over surface of 20×20 mm was constructed. The deposited coating with higher thickness of 2 μm has 10% deviation of thickness.
| Язык оригинала | Английский |
|---|---|
| Название основной публикации | Prospects of Fundamental Sciences Development, PFSD 2017 - Proceedings of the XIV International Conference of Students and Young Scientists |
| Издатель | American Institute of Physics Inc. |
| Том | 1899 |
| ISBN (электронное издание) | 9780735415874 |
| DOI | |
| Состояние | Опубликовано - 3 ноя 2017 |
| Событие | 14th International Conference of Students and Young Scientists on Prospects of Fundamental Sciences Development, PFSD 2017 - Tomsk, Российская Федерация Продолжительность: 25 апр 2017 → 28 апр 2017 |
Конференция
| Конференция | 14th International Conference of Students and Young Scientists on Prospects of Fundamental Sciences Development, PFSD 2017 |
|---|---|
| Страна | Российская Федерация |
| Город | Tomsk |
| Период | 25.4.17 → 28.4.17 |
Отпечаток
ASJC Scopus subject areas
- Physics and Astronomy(all)
Цитировать
Determination of thickness uniformity of nickel coatings deposited on zirconium alloy by magnetron sputtering. / Qiao, Jingwen; Bezmaternykh, Anna; Sednev, Dmitry.
Prospects of Fundamental Sciences Development, PFSD 2017 - Proceedings of the XIV International Conference of Students and Young Scientists. Том 1899 American Institute of Physics Inc., 2017. 040008.Результат исследований: Материалы для книги/типы отчетов › Материалы для конференции
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TY - GEN
T1 - Determination of thickness uniformity of nickel coatings deposited on zirconium alloy by magnetron sputtering
AU - Qiao, Jingwen
AU - Bezmaternykh, Anna
AU - Sednev, Dmitry
PY - 2017/11/3
Y1 - 2017/11/3
N2 - In this paper, the results of measurements of nickel coating thickness are presented. Ni coatings were deposited onto zirconium alloy Zr-1Nb and Si wafers by dc magnetron sputtering. The thickness of Ni coatings was measured by scanning electron microscopy (SEM), ball abrasion method and non-destructive X-ray diffraction (XRD) method. The developed technique of determination of coating uniformity by grazing incidence XRD method was shown. The estimation of uniformity of Ni coatings with a thickness from 0.5 to 2 μm was performed. The distribution map of the coating thickness over surface of 20×20 mm was constructed. The deposited coating with higher thickness of 2 μm has 10% deviation of thickness.
AB - In this paper, the results of measurements of nickel coating thickness are presented. Ni coatings were deposited onto zirconium alloy Zr-1Nb and Si wafers by dc magnetron sputtering. The thickness of Ni coatings was measured by scanning electron microscopy (SEM), ball abrasion method and non-destructive X-ray diffraction (XRD) method. The developed technique of determination of coating uniformity by grazing incidence XRD method was shown. The estimation of uniformity of Ni coatings with a thickness from 0.5 to 2 μm was performed. The distribution map of the coating thickness over surface of 20×20 mm was constructed. The deposited coating with higher thickness of 2 μm has 10% deviation of thickness.
UR - http://www.scopus.com/inward/record.url?scp=85034257079&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85034257079&partnerID=8YFLogxK
U2 - 10.1063/1.5009863
DO - 10.1063/1.5009863
M3 - Conference contribution
AN - SCOPUS:85034257079
VL - 1899
BT - Prospects of Fundamental Sciences Development, PFSD 2017 - Proceedings of the XIV International Conference of Students and Young Scientists
PB - American Institute of Physics Inc.
ER -