Determination of thickness uniformity of nickel coatings deposited on zirconium alloy by magnetron sputtering

Jingwen Qiao, Anna Bezmaternykh, Dmitry Sednev

Результат исследований: Материалы для книги/типы отчетовМатериалы для конференции

Выдержка

In this paper, the results of measurements of nickel coating thickness are presented. Ni coatings were deposited onto zirconium alloy Zr-1Nb and Si wafers by dc magnetron sputtering. The thickness of Ni coatings was measured by scanning electron microscopy (SEM), ball abrasion method and non-destructive X-ray diffraction (XRD) method. The developed technique of determination of coating uniformity by grazing incidence XRD method was shown. The estimation of uniformity of Ni coatings with a thickness from 0.5 to 2 μm was performed. The distribution map of the coating thickness over surface of 20×20 mm was constructed. The deposited coating with higher thickness of 2 μm has 10% deviation of thickness.

Язык оригиналаАнглийский
Название основной публикацииProspects of Fundamental Sciences Development, PFSD 2017 - Proceedings of the XIV International Conference of Students and Young Scientists
ИздательAmerican Institute of Physics Inc.
Том1899
ISBN (электронное издание)9780735415874
DOI
СостояниеОпубликовано - 3 ноя 2017
Событие14th International Conference of Students and Young Scientists on Prospects of Fundamental Sciences Development, PFSD 2017 - Tomsk, Российская Федерация
Продолжительность: 25 апр 201728 апр 2017

Конференция

Конференция14th International Conference of Students and Young Scientists on Prospects of Fundamental Sciences Development, PFSD 2017
СтранаРоссийская Федерация
ГородTomsk
Период25.4.1728.4.17

Отпечаток

nickel coatings
zirconium alloys
magnetron sputtering
coatings
abrasion
grazing incidence
diffraction
balls
x rays
wafers
deviation
scanning electron microscopy

ASJC Scopus subject areas

  • Physics and Astronomy(all)

Цитировать

Qiao, J., Bezmaternykh, A., & Sednev, D. (2017). Determination of thickness uniformity of nickel coatings deposited on zirconium alloy by magnetron sputtering. В Prospects of Fundamental Sciences Development, PFSD 2017 - Proceedings of the XIV International Conference of Students and Young Scientists (Том 1899). [040008] American Institute of Physics Inc.. https://doi.org/10.1063/1.5009863

Determination of thickness uniformity of nickel coatings deposited on zirconium alloy by magnetron sputtering. / Qiao, Jingwen; Bezmaternykh, Anna; Sednev, Dmitry.

Prospects of Fundamental Sciences Development, PFSD 2017 - Proceedings of the XIV International Conference of Students and Young Scientists. Том 1899 American Institute of Physics Inc., 2017. 040008.

Результат исследований: Материалы для книги/типы отчетовМатериалы для конференции

Qiao, J, Bezmaternykh, A & Sednev, D 2017, Determination of thickness uniformity of nickel coatings deposited on zirconium alloy by magnetron sputtering. в Prospects of Fundamental Sciences Development, PFSD 2017 - Proceedings of the XIV International Conference of Students and Young Scientists. том. 1899, 040008, American Institute of Physics Inc., Tomsk, Российская Федерация, 25.4.17. https://doi.org/10.1063/1.5009863
Qiao J, Bezmaternykh A, Sednev D. Determination of thickness uniformity of nickel coatings deposited on zirconium alloy by magnetron sputtering. В Prospects of Fundamental Sciences Development, PFSD 2017 - Proceedings of the XIV International Conference of Students and Young Scientists. Том 1899. American Institute of Physics Inc. 2017. 040008 https://doi.org/10.1063/1.5009863
Qiao, Jingwen ; Bezmaternykh, Anna ; Sednev, Dmitry. / Determination of thickness uniformity of nickel coatings deposited on zirconium alloy by magnetron sputtering. Prospects of Fundamental Sciences Development, PFSD 2017 - Proceedings of the XIV International Conference of Students and Young Scientists. Том 1899 American Institute of Physics Inc., 2017.
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