Deposition of silicon–carbon coatings from the plasma of a non-self-sustained arc discharge with a heated cathode

A. S. Grenadyorov, K. V. Oskomov, A. A. Solov’ev, S. V. Rabotkin

Результат исследований: Материалы для журналаСтатья

5 Цитирования (Scopus)

Выдержка

Amorphous hydrogenated carbon doped with silicon oxide (a-C:H:Si:O), which is referred to as silicon–carbon coatings in this work, consists of thin amorphous films, which are used as commercial solid lubricants due to their higher stability under extreme environmental conditions as compared to amorphous hydrogenated carbon. The deposition of silicon–carbon coatings from the plasma of a non-self-sustained arc discharge with a heated cathode is considered. Silicon–carbon coatings are deposited using polyphenul methylsiloxane as a precursor at a flow rate of 0.05 mL/min in an argon atmosphere at a pressure of 0.1 Pa. A high-frequency power supply is used to apply a high-frequency bias voltage to a substrate during deposition. After deposition, the mechanical properties of the coatings are studied. The maximum hardness of the coating is 20 GPa at a minimum friction coefficient of 0.16 and a wear rate of 1.3 × 10–5 mm3 N–1 m–1. Energy dispersive analysis shows that the coatings contain a significant content of carbon and oxygen (about 80 and 15%, respectively) and a low content of silicon (about 5%).

Язык оригиналаАнглийский
Страницы (с-по)690-695
Число страниц6
ЖурналTechnical Physics
Том61
Номер выпуска5
DOI
СостояниеОпубликовано - 1 мая 2016

Отпечаток

arc discharges
cathodes
coatings
carbon
solid lubricants
silicon oxides
power supplies
coefficient of friction
hardness
flow velocity
argon
mechanical properties
atmospheres
electric potential
silicon
oxygen

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Цитировать

Deposition of silicon–carbon coatings from the plasma of a non-self-sustained arc discharge with a heated cathode. / Grenadyorov, A. S.; Oskomov, K. V.; Solov’ev, A. A.; Rabotkin, S. V.

В: Technical Physics, Том 61, № 5, 01.05.2016, стр. 690-695.

Результат исследований: Материалы для журналаСтатья

Grenadyorov, A. S. ; Oskomov, K. V. ; Solov’ev, A. A. ; Rabotkin, S. V. / Deposition of silicon–carbon coatings from the plasma of a non-self-sustained arc discharge with a heated cathode. В: Technical Physics. 2016 ; Том 61, № 5. стр. 690-695.
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abstract = "Amorphous hydrogenated carbon doped with silicon oxide (a-C:H:Si:O), which is referred to as silicon–carbon coatings in this work, consists of thin amorphous films, which are used as commercial solid lubricants due to their higher stability under extreme environmental conditions as compared to amorphous hydrogenated carbon. The deposition of silicon–carbon coatings from the plasma of a non-self-sustained arc discharge with a heated cathode is considered. Silicon–carbon coatings are deposited using polyphenul methylsiloxane as a precursor at a flow rate of 0.05 mL/min in an argon atmosphere at a pressure of 0.1 Pa. A high-frequency power supply is used to apply a high-frequency bias voltage to a substrate during deposition. After deposition, the mechanical properties of the coatings are studied. The maximum hardness of the coating is 20 GPa at a minimum friction coefficient of 0.16 and a wear rate of 1.3 × 10–5 mm3 N–1 m–1. Energy dispersive analysis shows that the coatings contain a significant content of carbon and oxygen (about 80 and 15{\%}, respectively) and a low content of silicon (about 5{\%}).",
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AU - Rabotkin, S. V.

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N2 - Amorphous hydrogenated carbon doped with silicon oxide (a-C:H:Si:O), which is referred to as silicon–carbon coatings in this work, consists of thin amorphous films, which are used as commercial solid lubricants due to their higher stability under extreme environmental conditions as compared to amorphous hydrogenated carbon. The deposition of silicon–carbon coatings from the plasma of a non-self-sustained arc discharge with a heated cathode is considered. Silicon–carbon coatings are deposited using polyphenul methylsiloxane as a precursor at a flow rate of 0.05 mL/min in an argon atmosphere at a pressure of 0.1 Pa. A high-frequency power supply is used to apply a high-frequency bias voltage to a substrate during deposition. After deposition, the mechanical properties of the coatings are studied. The maximum hardness of the coating is 20 GPa at a minimum friction coefficient of 0.16 and a wear rate of 1.3 × 10–5 mm3 N–1 m–1. Energy dispersive analysis shows that the coatings contain a significant content of carbon and oxygen (about 80 and 15%, respectively) and a low content of silicon (about 5%).

AB - Amorphous hydrogenated carbon doped with silicon oxide (a-C:H:Si:O), which is referred to as silicon–carbon coatings in this work, consists of thin amorphous films, which are used as commercial solid lubricants due to their higher stability under extreme environmental conditions as compared to amorphous hydrogenated carbon. The deposition of silicon–carbon coatings from the plasma of a non-self-sustained arc discharge with a heated cathode is considered. Silicon–carbon coatings are deposited using polyphenul methylsiloxane as a precursor at a flow rate of 0.05 mL/min in an argon atmosphere at a pressure of 0.1 Pa. A high-frequency power supply is used to apply a high-frequency bias voltage to a substrate during deposition. After deposition, the mechanical properties of the coatings are studied. The maximum hardness of the coating is 20 GPa at a minimum friction coefficient of 0.16 and a wear rate of 1.3 × 10–5 mm3 N–1 m–1. Energy dispersive analysis shows that the coatings contain a significant content of carbon and oxygen (about 80 and 15%, respectively) and a low content of silicon (about 5%).

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