Correction of the distribution profiles of the intensities of elements considering the uneven dispersion of the glow-discharge optical emission spectrometer for multilayer coatings analysis

Ivan Shulepov, Anton Lomygin, Laptev Roman, Egor Kashkarov, Maksim Syrtanov

Результат исследований: Материалы для книги/типы отчетовМатериалы для конференции

Аннотация

Multilayer coatings are of great interest in applications ranging from optical to protective coatings. Several interesting properties of multilayer systems are due to the presence of an unusual structure, multiple boundaries, etc. As with any coating, multilayer systems require material degradation control when used and quality control when coatings are formed. Glow discharge optical emission spectrometry (GD-OES) is one of the methods allowing to resolve ultra-thin layers and have high depth resolution. GD-OES has some problems that affect the research results. One of them is obtaining depth distribution profiles of concentrations in heterogeneous structures. This paper shows the possibility to correct spectra after analysis by taking into account the non-uniformity of atomization due to the presence of instrumental and physical artefacts, as well as using a set of methods GD-OES - EAS (electronic Auger Spectroscopy) to obtain the distribution of concentrations at depth.

Язык оригиналаАнглийский
Название основной публикацииProceedings - 2020 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020
ИздательInstitute of Electrical and Electronics Engineers Inc.
Страницы1155-1159
Число страниц5
ISBN (электронное издание)9781728126869
DOI
СостояниеОпубликовано - 14 сен 2020
Событие7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020 - Virtual, Tomsk, Российская Федерация
Продолжительность: 14 сен 202026 сен 2020

Серия публикаций

НазваниеProceedings - 2020 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020

Конференция

Конференция7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020
СтранаРоссийская Федерация
ГородVirtual, Tomsk
Период14.9.2026.9.20

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Energy Engineering and Power Technology

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