Characteristics of (TiAlCrNbY)C films deposited by reactive magnetron sputtering

M. Braic, V. Braic, M. Balaceanu, C. N. Zoita, A. Vladescu, E. Grigore

Результат исследований: Материалы для журналаСтатья

28 Цитирования (Scopus)

Выдержка

(TiAlCrNbY)C multi-component carbide coatings were prepared by reactive co-sputtering of Ti, Al, Cr, Nb and Y targets in an Ar + CH4 atmosphere. The films were investigated for elemental and phase composition, chemical binding state, texture, morphology, residual stress, roughness, hardness, friction and wear using X-ray photoelectron spectroscopy (XPS), X-ray diffraction (XRD), atomic force microscopy (AFM), surface profilometry, hardness measurements, and tribological tests. The metals in the carbide films were found in an almost equiatomic ratio, whereas the carbon content varied from about 46 to 82 at.%. For film composition close to stoichiometry, a single fcc solid solution phase with an (111) preferred orientation was detected. The coatings with higher carbon concentrations (69-82 at.%) exhibited an amorphous structure. Fine grained and smooth surface morphologies were observed by AFM. While the metallic film exhibited a low tensile stress (∼ 0.240 GPa), the carbides coatings were subjected to compressive stress, with values (from 0.200 to 1.950 GPa) strongly depending on CH4 flow rate. The hardness values (13-23 GPa) were found to be lower than those usually reported for binary carbides (30-35 GPa), while the dry friction coefficients were in the range 0.05-0.25.

Язык оригиналаАнглийский
Страницы (с-по)2010-2014
Число страниц5
ЖурналSurface and Coatings Technology
Том204
Номер выпуска12-13
DOI
СостояниеОпубликовано - 15 мар 2010
Опубликовано для внешнего пользованияДа

Отпечаток

Reactive sputtering
carbides
Magnetron sputtering
Carbides
magnetron sputtering
hardness
Hardness
coatings
Coatings
Atomic force microscopy
Carbon
atomic force microscopy
Friction
dry friction
Metallic films
Profilometry
carbon
tensile stress
Compressive stress
Phase composition

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry

Цитировать

Characteristics of (TiAlCrNbY)C films deposited by reactive magnetron sputtering. / Braic, M.; Braic, V.; Balaceanu, M.; Zoita, C. N.; Vladescu, A.; Grigore, E.

В: Surface and Coatings Technology, Том 204, № 12-13, 15.03.2010, стр. 2010-2014.

Результат исследований: Материалы для журналаСтатья

Braic, M. ; Braic, V. ; Balaceanu, M. ; Zoita, C. N. ; Vladescu, A. ; Grigore, E. / Characteristics of (TiAlCrNbY)C films deposited by reactive magnetron sputtering. В: Surface and Coatings Technology. 2010 ; Том 204, № 12-13. стр. 2010-2014.
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abstract = "(TiAlCrNbY)C multi-component carbide coatings were prepared by reactive co-sputtering of Ti, Al, Cr, Nb and Y targets in an Ar + CH4 atmosphere. The films were investigated for elemental and phase composition, chemical binding state, texture, morphology, residual stress, roughness, hardness, friction and wear using X-ray photoelectron spectroscopy (XPS), X-ray diffraction (XRD), atomic force microscopy (AFM), surface profilometry, hardness measurements, and tribological tests. The metals in the carbide films were found in an almost equiatomic ratio, whereas the carbon content varied from about 46 to 82 at.{\%}. For film composition close to stoichiometry, a single fcc solid solution phase with an (111) preferred orientation was detected. The coatings with higher carbon concentrations (69-82 at.{\%}) exhibited an amorphous structure. Fine grained and smooth surface morphologies were observed by AFM. While the metallic film exhibited a low tensile stress (∼ 0.240 GPa), the carbides coatings were subjected to compressive stress, with values (from 0.200 to 1.950 GPa) strongly depending on CH4 flow rate. The hardness values (13-23 GPa) were found to be lower than those usually reported for binary carbides (30-35 GPa), while the dry friction coefficients were in the range 0.05-0.25.",
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AB - (TiAlCrNbY)C multi-component carbide coatings were prepared by reactive co-sputtering of Ti, Al, Cr, Nb and Y targets in an Ar + CH4 atmosphere. The films were investigated for elemental and phase composition, chemical binding state, texture, morphology, residual stress, roughness, hardness, friction and wear using X-ray photoelectron spectroscopy (XPS), X-ray diffraction (XRD), atomic force microscopy (AFM), surface profilometry, hardness measurements, and tribological tests. The metals in the carbide films were found in an almost equiatomic ratio, whereas the carbon content varied from about 46 to 82 at.%. For film composition close to stoichiometry, a single fcc solid solution phase with an (111) preferred orientation was detected. The coatings with higher carbon concentrations (69-82 at.%) exhibited an amorphous structure. Fine grained and smooth surface morphologies were observed by AFM. While the metallic film exhibited a low tensile stress (∼ 0.240 GPa), the carbides coatings were subjected to compressive stress, with values (from 0.200 to 1.950 GPa) strongly depending on CH4 flow rate. The hardness values (13-23 GPa) were found to be lower than those usually reported for binary carbides (30-35 GPa), while the dry friction coefficients were in the range 0.05-0.25.

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KW - Structure

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