The results of studies, development works, and tests of barrier-and capacitive-discharge excilamps radiating in the UV and VUV spectrum regions are presented. The main information on the designs of radiators and generators is presented. The spectral, temporal, and energy characteristics of excilamps based on the emission of KrCl*, XeCl*, XeI*, XeBr*, KrBr*, Xe*2, Br*2, and Cl*2 molecules and the I* atomic line are described. It is shown that the created generators and sealed-off radiators have long service lives. Examples of specific applications of excilamps are presented.
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