Approach to the clustering modeling for the strong correlative control measurements for estimation of percent of the suitable integrated circuits in the semiconductor industry

Ivan A. Ershov, Oleg Stukach

Результат исследований: Материалы для книги/типы отчетовМатериалы для конференции

4 Цитирования (Scopus)

Аннотация

The problem of increase of the suitable things percent exists in any manufacture. It may be solved by different ways, both technological, and by the general methodology of quality control. In the paper, this problem related to the semiconductor industry with own features is discussed. In particular, there is a problem of increase of the potential achievable percent of the suitable integrated circuit at a line production and simultaneous experimental designing on the same equipment. The technological path consists of several hundred operations, so revealing of their influence degree to result is a complicated problem demanding application of nonparametric statistics. On the other hand, the facility of modeling should be robust and simply, that allow to any operator make a decision on admission of a half-finished item to the further technological operations. The cluster analysis as a simple technique of the processes in semiconductor industry is given on example of the real data from semiconductor enterprise. The independent variable is the percent of the suitable integral circuit, and other variables represent results of the intermediate control on all extent of a technological path. The developed approach is illustrated by analysis of data from semiconductor enterprise, so received results have a practical value for manufacture of semiconductor devices.

Язык оригиналаАнглийский
Название основной публикации2016 Dynamics of Systems, Mechanisms and Machines, Dynamics 2016
ИздательInstitute of Electrical and Electronics Engineers Inc.
ISBN (электронное издание)9781509040506
DOI
СостояниеОпубликовано - 13 янв 2017
Событие2016 Dynamics of Systems, Mechanisms and Machines, Dynamics 2016 - Omsk, Российская Федерация
Продолжительность: 15 ноя 201617 ноя 2016

Конференция

Конференция2016 Dynamics of Systems, Mechanisms and Machines, Dynamics 2016
СтранаРоссийская Федерация
ГородOmsk
Период15.11.1617.11.16

    Fingerprint

ASJC Scopus subject areas

  • Energy Engineering and Power Technology
  • Civil and Structural Engineering
  • Mechanical Engineering
  • Fluid Flow and Transfer Processes
  • Computer Networks and Communications
  • Hardware and Architecture

Цитировать

Ershov, I. A., & Stukach, O. (2017). Approach to the clustering modeling for the strong correlative control measurements for estimation of percent of the suitable integrated circuits in the semiconductor industry. В 2016 Dynamics of Systems, Mechanisms and Machines, Dynamics 2016 [7819007] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/Dynamics.2016.7819007