Application of PVD methods to solid oxide fuel cells

A. A. Solovyev, N. S. Sochugov, S. V. Rabotkin, Anna Victorovna Shipilova, Igor Vyacheslavovich Ionov, Anastasia Nikolaevna Kovalchuk, Alena Olegovna Borduleva

Результат исследований: Материалы для журналаСтатья

24 Цитирования (Scopus)

Выдержка

In this paper, attention is paid to the application of such a method of vacuum physical vapor deposition (PVD) as magnetron sputtering for fabrication of a solid oxide fuel cell (SOFC) materials and structures. It is shown that the YSZ (yttria-stabilized zirconia) electrolyte and Ni-YSZ anode layers with required thickness, structure and composition can be effectively formed by PVD methods. The influence of parameters of pulsed power magnetron discharge on the deposition rate and the microstructure of the obtained YSZ electrolyte films were investigated. It is shown that the deposition rate of the oxide layers by magnetron sputtering can be significantly increased by using asymmetric bipolar power magnetrons, which creates serious prerequisites for applying this method on the industrial scale. Porous Ni-YSZ anode films were obtained by reactive co-sputtering of Ni and Zr-Y targets and subsequent reduction in the H 2 atmosphere at a temperature of 800°C. The Ni-YSZ films comprised small grains and pores of tens of nanometers.

Язык оригиналаАнглийский
Страницы (с-по)272-277
Число страниц6
ЖурналApplied Surface Science
Том310
DOI
СостояниеОпубликовано - 15 авг 2014

Отпечаток

Yttria stabilized zirconia
Physical vapor deposition
Solid oxide fuel cells (SOFC)
Deposition rates
Magnetron sputtering
Electrolytes
Anodes
Magnetrons
Oxides
Sputtering
Vacuum
Fabrication
Microstructure
Chemical analysis
Temperature

ASJC Scopus subject areas

  • Surfaces, Coatings and Films

Цитировать

Solovyev, A. A., Sochugov, N. S., Rabotkin, S. V., Shipilova, A. V., Ionov, I. V., Kovalchuk, A. N., & Borduleva, A. O. (2014). Application of PVD methods to solid oxide fuel cells. Applied Surface Science, 310, 272-277. https://doi.org/10.1016/j.apsusc.2014.03.163

Application of PVD methods to solid oxide fuel cells. / Solovyev, A. A.; Sochugov, N. S.; Rabotkin, S. V.; Shipilova, Anna Victorovna; Ionov, Igor Vyacheslavovich; Kovalchuk, Anastasia Nikolaevna; Borduleva, Alena Olegovna.

В: Applied Surface Science, Том 310, 15.08.2014, стр. 272-277.

Результат исследований: Материалы для журналаСтатья

Solovyev, AA, Sochugov, NS, Rabotkin, SV, Shipilova, AV, Ionov, IV, Kovalchuk, AN & Borduleva, AO 2014, 'Application of PVD methods to solid oxide fuel cells', Applied Surface Science, том. 310, стр. 272-277. https://doi.org/10.1016/j.apsusc.2014.03.163
Solovyev AA, Sochugov NS, Rabotkin SV, Shipilova AV, Ionov IV, Kovalchuk AN и соавт. Application of PVD methods to solid oxide fuel cells. Applied Surface Science. 2014 Авг. 15;310:272-277. https://doi.org/10.1016/j.apsusc.2014.03.163
Solovyev, A. A. ; Sochugov, N. S. ; Rabotkin, S. V. ; Shipilova, Anna Victorovna ; Ionov, Igor Vyacheslavovich ; Kovalchuk, Anastasia Nikolaevna ; Borduleva, Alena Olegovna. / Application of PVD methods to solid oxide fuel cells. В: Applied Surface Science. 2014 ; Том 310. стр. 272-277.
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