This article reports on the investigation of mechanical properties of carbon films deposited by dual magnetron sputtering system with closed and mirror magnetic field. There is shown that a-C films with predominantly sp2-phase have relatively high hardness (up to 20 GPa) and low friction index (∼0.01). The influence of magnetic field on friction index is determined. The analysis of experimental data shows the obtained a-C samples can be used for biomedicine applications.
ASJC Scopus subject areas
- Physics and Astronomy(all)