Annealing of laser patterned PMMA coated with gold and gallium

O. Lyutakov, J. Tuma, Y. Kalachyova, I. Huttel, V. Prajzler, V. Svorcik

Результат исследования: Материалы для журналаСтатья

6 Цитирования (Scopus)

Аннотация

Poly(methyl methacrylate) (PMMA) surface was patterned by laser scanning and Ga and Au layers of different thicknesses were sputtered onto modified polymer surface. The metal/PMMA structures were annealed at 160 C for 1 h and the changes in the surface morphology were examined by AFM and STM techniques. It was found that sufficiently thick and continuous metal coverage protect the underlying pattern structure.

Язык оригиналаАнглийский
Страницы (с... по...)3541-3545
Количество страниц5
ЖурналJournal of Materials Science: Materials in Electronics
Том24
Номер выпуска9
DOI
Статус публикацииОпубликовано - 1 сен 2013
Опубликовано для внешнего пользованияДа

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ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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