Annealing of laser patterned PMMA coated with gold and gallium

O. Lyutakov, J. Tuma, Y. Kalachyova, I. Huttel, V. Prajzler, V. Svorcik

Результат исследований: Материалы для журналаСтатья

6 Цитирования (Scopus)

Выдержка

Poly(methyl methacrylate) (PMMA) surface was patterned by laser scanning and Ga and Au layers of different thicknesses were sputtered onto modified polymer surface. The metal/PMMA structures were annealed at 160 C for 1 h and the changes in the surface morphology were examined by AFM and STM techniques. It was found that sufficiently thick and continuous metal coverage protect the underlying pattern structure.

Язык оригиналаАнглийский
Страницы (с-по)3541-3545
Число страниц5
ЖурналJournal of Materials Science: Materials in Electronics
Том24
Номер выпуска9
DOI
СостояниеОпубликовано - 1 сен 2013
Опубликовано для внешнего пользованияДа

Отпечаток

Gallium
Polymethyl Methacrylate
Polymethyl methacrylates
polymethyl methacrylate
Gold
gallium
Metals
Annealing
gold
annealing
Lasers
lasers
Surface morphology
Polymers
Scanning
metals
atomic force microscopy
scanning
polymers

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

Цитировать

Annealing of laser patterned PMMA coated with gold and gallium. / Lyutakov, O.; Tuma, J.; Kalachyova, Y.; Huttel, I.; Prajzler, V.; Svorcik, V.

В: Journal of Materials Science: Materials in Electronics, Том 24, № 9, 01.09.2013, стр. 3541-3545.

Результат исследований: Материалы для журналаСтатья

Lyutakov, O. ; Tuma, J. ; Kalachyova, Y. ; Huttel, I. ; Prajzler, V. ; Svorcik, V. / Annealing of laser patterned PMMA coated with gold and gallium. В: Journal of Materials Science: Materials in Electronics. 2013 ; Том 24, № 9. стр. 3541-3545.
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