An automated setup for production of nanodimensional coatings by the polyelectrolyte self-assembly method

S. A. Portnov, A. M. Yashchenok, A. S. Gubskii, D. A. Gorin, A. A. Neveshkin, B. N. Klimov, A. A. Nefedov, M. V. Lomova

Результат исследований: Материалы для журналаСтатья

16 Цитирования (Scopus)

Выдержка

A POLYION-1M automated setup for production of nanodimensional coatings by the polyelectrolyte self-assembly method is described. The design, the scheme of connection with a computer, and software of the setup are described. The results of comparison of the parameters of the setup developed and its foreign analog are analyzed. Nanodimensional films with a varied number of layers on silicon substrates were produced. The refractive index and thickness of films were determined by the ellipsometry technique.

Язык оригиналаАнглийский
Страницы (с-по)849-854
Число страниц6
ЖурналInstruments and Experimental Techniques
Том49
Номер выпуска6
DOI
СостояниеОпубликовано - дек 2006
Опубликовано для внешнего пользованияДа

Отпечаток

Polyelectrolytes
Self assembly
self assembly
coatings
Coatings
Ellipsometry
Refractive index
Silicon
ellipsometry
Substrates
refractivity
analogs
computer programs
silicon

ASJC Scopus subject areas

  • Engineering (miscellaneous)
  • Instrumentation

Цитировать

Portnov, S. A., Yashchenok, A. M., Gubskii, A. S., Gorin, D. A., Neveshkin, A. A., Klimov, B. N., ... Lomova, M. V. (2006). An automated setup for production of nanodimensional coatings by the polyelectrolyte self-assembly method. Instruments and Experimental Techniques, 49(6), 849-854. https://doi.org/10.1134/S0020441206060157

An automated setup for production of nanodimensional coatings by the polyelectrolyte self-assembly method. / Portnov, S. A.; Yashchenok, A. M.; Gubskii, A. S.; Gorin, D. A.; Neveshkin, A. A.; Klimov, B. N.; Nefedov, A. A.; Lomova, M. V.

В: Instruments and Experimental Techniques, Том 49, № 6, 12.2006, стр. 849-854.

Результат исследований: Материалы для журналаСтатья

Portnov, SA, Yashchenok, AM, Gubskii, AS, Gorin, DA, Neveshkin, AA, Klimov, BN, Nefedov, AA & Lomova, MV 2006, 'An automated setup for production of nanodimensional coatings by the polyelectrolyte self-assembly method', Instruments and Experimental Techniques, том. 49, № 6, стр. 849-854. https://doi.org/10.1134/S0020441206060157
Portnov, S. A. ; Yashchenok, A. M. ; Gubskii, A. S. ; Gorin, D. A. ; Neveshkin, A. A. ; Klimov, B. N. ; Nefedov, A. A. ; Lomova, M. V. / An automated setup for production of nanodimensional coatings by the polyelectrolyte self-assembly method. В: Instruments and Experimental Techniques. 2006 ; Том 49, № 6. стр. 849-854.
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