Amplitude control system of drive-mode oscillations of MEMS gyroscopes

T. G. Nesterenko, E. S. Barbin, P. F. Baranov, Lo Van Hao

Результат исследований: Материалы для журналарецензирование


Two operating modes can be singled out for a gyroscope, namely drive mode and sense mode. During the drive mode, electrostatic forces of gyroscope enable drive-mode harmonic oscillations of a moving mass. With the angular velocity and translational acceleration of an object in the sense mode, a moving mass moves due to the Coriolis and inertial forces, thereby causing changes in capacitances of comb structures. Resultant capacitance changes are proportional to parameters to be measured, i.e. the rotational rate and linear acceleration. The aim of this work is to investigate and create a system of amplitude control of drive-mode oscillations. To improve the mems efficiency, drive-mode oscillations are excited at a resonant frequency.

Язык оригиналаАнглийский
Номер статьи012009
ЖурналIOP Conference Series: Materials Science and Engineering
Номер выпуска1
СостояниеОпубликовано - 26 апр 2019
Событие3rd International Conference on Cognitive Robotics - Tomsk, Российская Федерация
Продолжительность: 22 ноя 201824 ноя 2018

ASJC Scopus subject areas

  • Materials Science(all)
  • Engineering(all)

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