A Universal Ion Source

G. V. Potemkin, V. F. Kalmykov

    Результат исследований: Материалы для журналаСтатья

    2 Цитирования (Scopus)


    A model of an ion source based on a glow discharge in crossed fields for obtaining a drop-free stationary beam with a controlled Ti-to-N component ratio is described. A two-stage process of producing a gas-metal plasma takes place in a two-chamber device. The external ring-shaped chamber is the plasma source of a radially converging gas ion beam entering the internal chamber, in which metal vapors are produced by means of controllable sputtering of an isolated target electrode, and a gas-metal plasma is obtained for extraction of a mixed ion beam. A ion beam with an energy of 40 keV and a current of 6 mA at a Ti-to-N ratio of -0.8 is extrt-acted. The model is designed for studying processes related to the obtainment of nonseparated beams of mixed composition and their use in technology.

    Язык оригиналаАнглийский
    Страницы (с-по)704-708
    Число страниц5
    ЖурналInstruments and Experimental Techniques
    Номер выпуска5
    СостояниеОпубликовано - 2001

    ASJC Scopus subject areas

    • Engineering (miscellaneous)
    • Instrumentation

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