A Novel System of Primary Oscillations for Micromechanical Gyroscope

P. Baranov, T. Nesterenko, B. B. Duc, L. V. Hao

Результат исследований: Материалы для журналарецензирование

Аннотация

The paper proposes a novel system of primary oscillations produced by the microelectromechanical (MEMS) gyroscope. This system is based on a synchronous detection of the current passing through the power capacitances of MEMS gyroscope. This detection method enables the excitation and stabilization of primary oscillations during two measuring cycles. The proposed system of primary oscillations also enhances the operation speed and the accuracy of frequency control, and reduces the ambient temperature effect on the stability of the scaling factor of the MEMS gyroscope.

Язык оригиналаАнглийский
Номер статьи012004
ЖурналIOP Conference Series: Materials Science and Engineering
Том841
Номер выпуска1
DOI
СостояниеОпубликовано - 16 июн 2020
Событие2019 4th International Conference on Mechatronics and Electrical Systems, ICMES 2019 - Prague, Чешская Республика
Продолжительность: 11 окт 201913 окт 2019

ASJC Scopus subject areas

  • Materials Science(all)
  • Engineering(all)

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