Аннотация
A new approach to layer-by-layer film deposition is developed based on the data of molecular dynamics modeling. The proposed deposition method makes use of a nonlinear pulse interaction with a free material (source) surface. It is shown that, provided the pulse amplitude is sufficiently large, an atomic plane is detached from the surface. Impinging on a target (substrate), the detached plane forms a monolayer coating. Combining various source materials, it is possible to obtain multilayer films with complicated compositions and structures.
Язык оригинала | Английский |
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Страницы (с-по) | 851-853 |
Число страниц | 3 |
Журнал | Technical Physics Letters |
Том | 26 |
Номер выпуска | 10 |
DOI | |
Состояние | Опубликовано - 1 янв 2000 |
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)