A new method of layer deposition

A new approach to layer-by-layer film deposition is developed based on the data of molecular dynamics modeling. The proposed deposition method makes use of a nonlinear pulse interaction with a free material (source) surface. It is shown that, provided the pulse amplitude is sufficiently large, an atomic plane is detached from the surface. Impinging on a target (substrate), the detached plane forms a monolayer coating. Combining various source materials, it is possible to obtain multilayer films with complicated compositions and structures.