A new method of layer deposition

S. G. Psakh'e, K. P. Zol'nikov, T. Yu Uvarov

    Результат исследований: Материалы для журнала › Статья

    Выдержка

    A new approach to layer-by-layer film deposition is developed based on the data of molecular dynamics modeling. The proposed deposition method makes use of a nonlinear pulse interaction with a free material (source) surface. It is shown that, provided the pulse amplitude is sufficiently large, an atomic plane is detached from the surface. Impinging on a target (substrate), the detached plane forms a monolayer coating. Combining various source materials, it is possible to obtain multilayer films with complicated compositions and structures.

    Язык оригиналаАнглийский
    Страницы (с-по)851-853
    Число страниц3
    ЖурналTechnical Physics Letters
    Том26
    Номер выпуска10
    DOI
    СостояниеОпубликовано - 1 янв 2000

    Отпечаток

    pulse amplitude
    molecular dynamics
    coatings
    pulses
    interactions

    ASJC Scopus subject areas

    • Physics and Astronomy (miscellaneous)

    Цитировать

    Psakh'e, S. G., Zol'nikov, K. P., & Uvarov, T. Y. (2000). A new method of layer deposition. Technical Physics Letters, 26(10), 851-853. https://doi.org/10.1134/1.1321217

    A new method of layer deposition. / Psakh'e, S. G.; Zol'nikov, K. P.; Uvarov, T. Yu.

    В: Technical Physics Letters, Том 26, № 10, 01.01.2000, стр. 851-853.

    Результат исследований: Материалы для журнала › Статья

    Psakh'e, SG, Zol'nikov, KP & Uvarov, TY 2000, 'A new method of layer deposition', Technical Physics Letters, том. 26, № 10, стр. 851-853. https://doi.org/10.1134/1.1321217
    Psakh'e SG, Zol'nikov KP, Uvarov TY. A new method of layer deposition. Technical Physics Letters. 2000 Янв. 1;26(10):851-853. https://doi.org/10.1134/1.1321217
    Psakh'e, S. G. ; Zol'nikov, K. P. ; Uvarov, T. Yu. / A new method of layer deposition. В: Technical Physics Letters. 2000 ; Том 26, № 10. стр. 851-853.
    @article{5a3e3f5c46934b97b0d4a96438f0081c,
    title = "A new method of layer deposition",
    abstract = "A new approach to layer-by-layer film deposition is developed based on the data of molecular dynamics modeling. The proposed deposition method makes use of a nonlinear pulse interaction with a free material (source) surface. It is shown that, provided the pulse amplitude is sufficiently large, an atomic plane is detached from the surface. Impinging on a target (substrate), the detached plane forms a monolayer coating. Combining various source materials, it is possible to obtain multilayer films with complicated compositions and structures.",
    author = "Psakh'e, {S. G.} and Zol'nikov, {K. P.} and Uvarov, {T. Yu}",
    year = "2000",
    month = "1",
    day = "1",
    doi = "10.1134/1.1321217",
    language = "English",
    volume = "26",
    pages = "851--853",
    journal = "Technical Physics Letters",
    issn = "1063-7850",
    publisher = "Maik Nauka-Interperiodica Publishing",
    number = "10",

    }

    TY - JOUR

    T1 - A new method of layer deposition

    AU - Psakh'e, S. G.

    AU - Zol'nikov, K. P.

    AU - Uvarov, T. Yu

    PY - 2000/1/1

    Y1 - 2000/1/1

    N2 - A new approach to layer-by-layer film deposition is developed based on the data of molecular dynamics modeling. The proposed deposition method makes use of a nonlinear pulse interaction with a free material (source) surface. It is shown that, provided the pulse amplitude is sufficiently large, an atomic plane is detached from the surface. Impinging on a target (substrate), the detached plane forms a monolayer coating. Combining various source materials, it is possible to obtain multilayer films with complicated compositions and structures.

    AB - A new approach to layer-by-layer film deposition is developed based on the data of molecular dynamics modeling. The proposed deposition method makes use of a nonlinear pulse interaction with a free material (source) surface. It is shown that, provided the pulse amplitude is sufficiently large, an atomic plane is detached from the surface. Impinging on a target (substrate), the detached plane forms a monolayer coating. Combining various source materials, it is possible to obtain multilayer films with complicated compositions and structures.

    UR - http://www.scopus.com/inward/record.url?scp=0034288315&partnerID=8YFLogxK

    UR - http://www.scopus.com/inward/citedby.url?scp=0034288315&partnerID=8YFLogxK

    U2 - 10.1134/1.1321217

    DO - 10.1134/1.1321217

    M3 - Article

    AN - SCOPUS:0034288315

    VL - 26

    SP - 851

    EP - 853

    JO - Technical Physics Letters

    JF - Technical Physics Letters

    SN - 1063-7850

    IS - 10

    ER -

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