A forevacuum plasma source of pulsed electron beams

Yu G. Yushkov, V. A. Burdovitsin, A. V. Medovnik, E. M. Oks

Результат исследований: Материалы для журналаСтатья

12 Цитирования (Scopus)


A plasma electron source designed for generation of a pulsed wide-aperture electron beam in the forevacuum pressure range (5-20 Pa) is described. The source is based on the use of a hollow-cathode glow discharge. At an accelerating voltage of 20 kV, a current pulse length of 100 μs, and a pulse repetition rate of 10 Hz, the electron beam current is 100 A, and the maximum density of the beam pulse power is 10 J/cm2. The obtained parameters of the electron beam and the features of the source functioning in the forevacuum pressure range show that this source can be used to good effect to modify the surface properties of nonconducting materials.

Язык оригиналаАнглийский
Страницы (с-по)226-229
Число страниц4
ЖурналInstruments and Experimental Techniques
Номер выпуска2
СостояниеОпубликовано - мар 2011

ASJC Scopus subject areas

  • Instrumentation

Fingerprint Подробные сведения о темах исследования «A forevacuum plasma source of pulsed electron beams». Вместе они формируют уникальный семантический отпечаток (fingerprint).

  • Цитировать