(Zr,Ti,O) alloy films with enhanced hardness and resistance to cracking prepared by magnetron sputtering

J. Musil, S. Zenkin, R. Čerstvý, S. Haviar, Z. Čiperová

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

The article reports on the effect of (i) the ion bombardment and (ii) the addition of small amount of oxygen into Ar sputtering gas on the structure, microstructure, mechanical properties and macrostress of the (Zr,Ti) alloy films prepared by DC magnetron sputtering. Properties of the (Zr,Ti) alloy films with three different elemental compositions – (1) Zr95Ti5, (2) Zr30Ti70 and (3) Zr5Ti95 were investigated in detail. It was found that (1) the (Zr,Ti) alloy films sputtered at a low value of the negative substrate bias Us = − 50 V are well crystalline, (2) the (Zr,Ti) alloy films sputtered at high values of the negative substrate bias

Original languageEnglish
Pages (from-to)86-91
Number of pages6
JournalSurface and Coatings Technology
Volume322
DOIs
Publication statusPublished - 15 Aug 2017

Keywords

  • (Zr,Ti) alloy films
  • (Zr,Ti,O) alloy films
  • Mechanical properties
  • Microstructure
  • Resistance to cracking
  • Structure

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry

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