Abstract
An excimer laser system having an output aperture diameter of 40 cm and consisting of five lasers, three of which are excited by an electric discharge and the remaining two by an electron beam, is built. The first laser produces a 308-nm radiation with a duration of 200-250 ns, a spectral linewidth of 0.9 cm-1 and the beam divergence close to the diffraction limit. This pulse is amplified in the active media of the other lasers. As a result, radiation with an energy of 5 J, spectral linewidth 0.9 cm-1 and beam divergence 37 μrad is produced at the output of the third laser. The output energy of the entire system amounts to 330 J and the pulse duration is 200-250 ns.
| Original language | English |
|---|---|
| Pages (from-to) | 33-38 |
| Number of pages | 6 |
| Journal | Quantum Electronics |
| Volume | 36 |
| Issue number | 1 |
| DOIs | |
| Publication status | Published - Jan 2006 |
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Keywords
- Excimer amplifier
- Excimer laser system
- Pulse duration
ASJC Scopus subject areas
- Electrical and Electronic Engineering
- Physics and Astronomy (miscellaneous)
Cite this
Wide-aperture excimer laser system. / Losev, V. F.; Kovalchuk, B. M.; Tarasenko, V. F.; Panchenko, Yu N.; Ivanov, N. G.; Konovalov, I. N.; Abdullin, E. N.; Panchenko, A. N.; Liu, J.; Zorin, V. B.; Skakun, V. S.; Gubanov, V. P.; Stepchenko, A. S.; Tolkachev, V. S.
In: Quantum Electronics, Vol. 36, No. 1, 01.2006, p. 33-38.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Wide-aperture excimer laser system
AU - Losev, V. F.
AU - Kovalchuk, B. M.
AU - Tarasenko, V. F.
AU - Panchenko, Yu N.
AU - Ivanov, N. G.
AU - Konovalov, I. N.
AU - Abdullin, E. N.
AU - Panchenko, A. N.
AU - Liu, J.
AU - Zorin, V. B.
AU - Skakun, V. S.
AU - Gubanov, V. P.
AU - Stepchenko, A. S.
AU - Tolkachev, V. S.
PY - 2006/1
Y1 - 2006/1
N2 - An excimer laser system having an output aperture diameter of 40 cm and consisting of five lasers, three of which are excited by an electric discharge and the remaining two by an electron beam, is built. The first laser produces a 308-nm radiation with a duration of 200-250 ns, a spectral linewidth of 0.9 cm-1 and the beam divergence close to the diffraction limit. This pulse is amplified in the active media of the other lasers. As a result, radiation with an energy of 5 J, spectral linewidth 0.9 cm-1 and beam divergence 37 μrad is produced at the output of the third laser. The output energy of the entire system amounts to 330 J and the pulse duration is 200-250 ns.
AB - An excimer laser system having an output aperture diameter of 40 cm and consisting of five lasers, three of which are excited by an electric discharge and the remaining two by an electron beam, is built. The first laser produces a 308-nm radiation with a duration of 200-250 ns, a spectral linewidth of 0.9 cm-1 and the beam divergence close to the diffraction limit. This pulse is amplified in the active media of the other lasers. As a result, radiation with an energy of 5 J, spectral linewidth 0.9 cm-1 and beam divergence 37 μrad is produced at the output of the third laser. The output energy of the entire system amounts to 330 J and the pulse duration is 200-250 ns.
KW - Excimer amplifier
KW - Excimer laser system
KW - Pulse duration
UR - http://www.scopus.com/inward/record.url?scp=33645521393&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=33645521393&partnerID=8YFLogxK
U2 - 10.1070/QE2006v036n01ABEH012795
DO - 10.1070/QE2006v036n01ABEH012795
M3 - Article
VL - 36
SP - 33
EP - 38
JO - Quantum Electronics
JF - Quantum Electronics
SN - 1063-7818
IS - 1
ER -