Wide-aperture excimer laser system

V. F. Losev, B. M. Kovalchuk, V. F. Tarasenko, Yu N. Panchenko, N. G. Ivanov, I. N. Konovalov, E. N. Abdullin, A. N. Panchenko, J. Liu, V. B. Zorin, V. S. Skakun, V. P. Gubanov, A. S. Stepchenko, V. S. Tolkachev

    Research output: Contribution to journalArticlepeer-review

    1 Citation (Scopus)


    An excimer laser system having an output aperture diameter of 40 cm and consisting of five lasers, three of which are excited by an electric discharge and the remaining two by an electron beam, is built. The first laser produces a 308-nm radiation with a duration of 200-250 ns, a spectral linewidth of 0.9 cm-1 and the beam divergence close to the diffraction limit. This pulse is amplified in the active media of the other lasers. As a result, radiation with an energy of 5 J, spectral linewidth 0.9 cm-1 and beam divergence 37 μrad is produced at the output of the third laser. The output energy of the entire system amounts to 330 J and the pulse duration is 200-250 ns.

    Original languageEnglish
    Pages (from-to)33-38
    Number of pages6
    JournalQuantum Electronics
    Issue number1
    Publication statusPublished - Jan 2006


    • Excimer amplifier
    • Excimer laser system
    • Pulse duration

    ASJC Scopus subject areas

    • Electrical and Electronic Engineering
    • Physics and Astronomy (miscellaneous)

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