Wide-aperture excimer laser system

V. F. Losev, B. M. Kovalchuk, V. F. Tarasenko, Yu N. Panchenko, N. G. Ivanov, I. N. Konovalov, E. N. Abdullin, A. N. Panchenko, J. Liu, V. B. Zorin, V. S. Skakun, V. P. Gubanov, A. S. Stepchenko, V. S. Tolkachev

    Research output: Contribution to journalArticle

    1 Citation (Scopus)

    Abstract

    An excimer laser system having an output aperture diameter of 40 cm and consisting of five lasers, three of which are excited by an electric discharge and the remaining two by an electron beam, is built. The first laser produces a 308-nm radiation with a duration of 200-250 ns, a spectral linewidth of 0.9 cm-1 and the beam divergence close to the diffraction limit. This pulse is amplified in the active media of the other lasers. As a result, radiation with an energy of 5 J, spectral linewidth 0.9 cm-1 and beam divergence 37 μrad is produced at the output of the third laser. The output energy of the entire system amounts to 330 J and the pulse duration is 200-250 ns.

    Original languageEnglish
    Pages (from-to)33-38
    Number of pages6
    JournalQuantum Electronics
    Volume36
    Issue number1
    DOIs
    Publication statusPublished - Jan 2006

    Fingerprint

    Excimer lasers
    excimer lasers
    apertures
    Lasers
    Linewidth
    lasers
    output
    divergence
    Radiation
    Electric discharges
    electric discharges
    radiation
    Electron beams
    pulse duration
    Diffraction
    electron beams
    energy
    pulses
    diffraction

    Keywords

    • Excimer amplifier
    • Excimer laser system
    • Pulse duration

    ASJC Scopus subject areas

    • Electrical and Electronic Engineering
    • Physics and Astronomy (miscellaneous)

    Cite this

    Losev, V. F., Kovalchuk, B. M., Tarasenko, V. F., Panchenko, Y. N., Ivanov, N. G., Konovalov, I. N., ... Tolkachev, V. S. (2006). Wide-aperture excimer laser system. Quantum Electronics, 36(1), 33-38. https://doi.org/10.1070/QE2006v036n01ABEH012795

    Wide-aperture excimer laser system. / Losev, V. F.; Kovalchuk, B. M.; Tarasenko, V. F.; Panchenko, Yu N.; Ivanov, N. G.; Konovalov, I. N.; Abdullin, E. N.; Panchenko, A. N.; Liu, J.; Zorin, V. B.; Skakun, V. S.; Gubanov, V. P.; Stepchenko, A. S.; Tolkachev, V. S.

    In: Quantum Electronics, Vol. 36, No. 1, 01.2006, p. 33-38.

    Research output: Contribution to journalArticle

    Losev, VF, Kovalchuk, BM, Tarasenko, VF, Panchenko, YN, Ivanov, NG, Konovalov, IN, Abdullin, EN, Panchenko, AN, Liu, J, Zorin, VB, Skakun, VS, Gubanov, VP, Stepchenko, AS & Tolkachev, VS 2006, 'Wide-aperture excimer laser system', Quantum Electronics, vol. 36, no. 1, pp. 33-38. https://doi.org/10.1070/QE2006v036n01ABEH012795
    Losev VF, Kovalchuk BM, Tarasenko VF, Panchenko YN, Ivanov NG, Konovalov IN et al. Wide-aperture excimer laser system. Quantum Electronics. 2006 Jan;36(1):33-38. https://doi.org/10.1070/QE2006v036n01ABEH012795
    Losev, V. F. ; Kovalchuk, B. M. ; Tarasenko, V. F. ; Panchenko, Yu N. ; Ivanov, N. G. ; Konovalov, I. N. ; Abdullin, E. N. ; Panchenko, A. N. ; Liu, J. ; Zorin, V. B. ; Skakun, V. S. ; Gubanov, V. P. ; Stepchenko, A. S. ; Tolkachev, V. S. / Wide-aperture excimer laser system. In: Quantum Electronics. 2006 ; Vol. 36, No. 1. pp. 33-38.
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