Wide-aperture excimer laser system

Abstract

An excimer laser system having an output aperture diameter of 40 cm and consisting of five lasers, three of which are excited by an electric discharge and the remaining two by an electron beam, is built. The first laser produces a 308-nm radiation with a duration of 200-250 ns, a spectral linewidth of 0.9 cm^-1 and the beam divergence close to the diffraction limit. This pulse is amplified in the active media of the other lasers. As a result, radiation with an energy of 5 J, spectral linewidth 0.9 cm^-1 and beam divergence 37 μrad is produced at the output of the third laser. The output energy of the entire system amounts to 330 J and the pulse duration is 200-250 ns.

Original language	English
Pages (from-to)	33-38
Number of pages	6
Journal	Quantum Electronics
Volume	36
Issue number	1
DOIs	https://doi.org/10.1070/QE2006v036n01ABEH012795
Publication status	Published - Jan 2006

Keywords

Excimer amplifier
Excimer laser system
Pulse duration

ASJC Scopus subject areas

Electrical and Electronic Engineering
Physics and Astronomy (miscellaneous)

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10.1070/QE2006v036n01ABEH012795

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Losev, V. F., Kovalchuk, B. M., Tarasenko, V. F., Panchenko, Y. N., Ivanov, N. G., Konovalov, I. N., Abdullin, E. N., Panchenko, A. N., Liu, J., Zorin, V. B., Skakun, V. S., Gubanov, V. P., Stepchenko, A. S., & Tolkachev, V. S. (2006). Wide-aperture excimer laser system. Quantum Electronics, 36(1), 33-38. https://doi.org/10.1070/QE2006v036n01ABEH012795

Wide-aperture excimer laser system. / Losev, V. F.; Kovalchuk, B. M.; Tarasenko, V. F.; Panchenko, Yu N.; Ivanov, N. G.; Konovalov, I. N.; Abdullin, E. N.; Panchenko, A. N.; Liu, J.; Zorin, V. B.; Skakun, V. S.; Gubanov, V. P.; Stepchenko, A. S.; Tolkachev, V. S.

In: Quantum Electronics, Vol. 36, No. 1, 01.2006, p. 33-38.

Research output: Contribution to journal › Article

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title = "Wide-aperture excimer laser system",

abstract = "An excimer laser system having an output aperture diameter of 40 cm and consisting of five lasers, three of which are excited by an electric discharge and the remaining two by an electron beam, is built. The first laser produces a 308-nm radiation with a duration of 200-250 ns, a spectral linewidth of 0.9 cm-1 and the beam divergence close to the diffraction limit. This pulse is amplified in the active media of the other lasers. As a result, radiation with an energy of 5 J, spectral linewidth 0.9 cm-1 and beam divergence 37 μrad is produced at the output of the third laser. The output energy of the entire system amounts to 330 J and the pulse duration is 200-250 ns.",

keywords = "Excimer amplifier, Excimer laser system, Pulse duration",

author = "Losev, {V. F.} and Kovalchuk, {B. M.} and Tarasenko, {V. F.} and Panchenko, {Yu N.} and Ivanov, {N. G.} and Konovalov, {I. N.} and Abdullin, {E. N.} and Panchenko, {A. N.} and J. Liu and Zorin, {V. B.} and Skakun, {V. S.} and Gubanov, {V. P.} and Stepchenko, {A. S.} and Tolkachev, {V. S.}",

year = "2006",

month = jan,

doi = "10.1070/QE2006v036n01ABEH012795",

language = "English",

volume = "36",

pages = "33--38",

journal = "Quantum Electronics",

issn = "1063-7818",

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T1 - Wide-aperture excimer laser system

AU - Losev, V. F.

AU - Kovalchuk, B. M.

AU - Tarasenko, V. F.

AU - Panchenko, Yu N.

AU - Ivanov, N. G.

AU - Konovalov, I. N.

AU - Abdullin, E. N.

AU - Panchenko, A. N.

AU - Liu, J.

AU - Zorin, V. B.

AU - Skakun, V. S.

AU - Gubanov, V. P.

AU - Stepchenko, A. S.

AU - Tolkachev, V. S.

PY - 2006/1

Y1 - 2006/1

N2 - An excimer laser system having an output aperture diameter of 40 cm and consisting of five lasers, three of which are excited by an electric discharge and the remaining two by an electron beam, is built. The first laser produces a 308-nm radiation with a duration of 200-250 ns, a spectral linewidth of 0.9 cm-1 and the beam divergence close to the diffraction limit. This pulse is amplified in the active media of the other lasers. As a result, radiation with an energy of 5 J, spectral linewidth 0.9 cm-1 and beam divergence 37 μrad is produced at the output of the third laser. The output energy of the entire system amounts to 330 J and the pulse duration is 200-250 ns.

AB - An excimer laser system having an output aperture diameter of 40 cm and consisting of five lasers, three of which are excited by an electric discharge and the remaining two by an electron beam, is built. The first laser produces a 308-nm radiation with a duration of 200-250 ns, a spectral linewidth of 0.9 cm-1 and the beam divergence close to the diffraction limit. This pulse is amplified in the active media of the other lasers. As a result, radiation with an energy of 5 J, spectral linewidth 0.9 cm-1 and beam divergence 37 μrad is produced at the output of the third laser. The output energy of the entire system amounts to 330 J and the pulse duration is 200-250 ns.

KW - Excimer amplifier

KW - Excimer laser system

KW - Pulse duration

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