Visualization and identification of nanoparticles in si subjected to the successive implantation of 64Zn+ and 16O+ ions

V. V. Privezentsev, V. S. Kulikauskas, A. N. Shemuhin, A. Yu Trifonov, E. P. Kirilenko, A. A. Batrakov

Research output: Contribution to journalArticle

Abstract

Nanoparticles are visualized and identified in a near-surface Si layer subjected to the successive implantation of 64Zn+ and 16O+ ions. Scanning transmission electron microscopy coupled with energy-dispersive spectroscopy and X-ray photoelectron spectroscopy are used. An amorphized region 150 nm thick and a disturbed layer 50 nm thick in the near-surface layer of the substrate are revealed after implantation. Zinc oxide (ZnO) nanoparticles with an average size of 8.7 nm are found in the recrystallized polycrystalline silicon layer after annealing in a neutral-inert atmosphere at a temperature of 600–800°C.

Original languageEnglish
Pages (from-to)1325-1331
Number of pages7
JournalBulletin of the Russian Academy of Sciences: Physics
Volume79
Issue number11
DOIs
Publication statusPublished - 1 Nov 2015

    Fingerprint

ASJC Scopus subject areas

  • Physics and Astronomy(all)

Cite this