Vacuum-ultraviolet excilamps with excitation by a barrier corona discharge

M. I. Lomaev, V. S. Skakun, V. F. Tarasenko, D. V. Shitts, M. V. Erofeev

Research output: Contribution to journalArticle

Abstract

This paper presents the results of studies of excilamps with excitation by a barrier corona discharge, which is characterized by inhomogeneous broadening of the electric field between the electrodes, one of which is covered by a dielectric. It is established that the radiation efficiency from inert-gas dimers under these excitation conditions reaches 45% at 172 nm and 25% at 146 nm. These studies were used as a basis for creating a radiator complex consisting of sealed xenon-dimer excilamps with a radiation power of up to 120 W, and a wide-aperture compact excilamp with argon pumped through the discharge volume. The radiation power density of the compact excilamp reached 10 mW/cm2 in the windowless regime.

Original languageEnglish
Pages (from-to)503-508
Number of pages6
JournalJournal of Optical Technology (A Translation of Opticheskii Zhurnal)
Volume79
Issue number8
Publication statusPublished - 31 Aug 2012

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Corona
electric corona
Ultraviolet
Vacuum
Excitation
Radiation
Dimer
Dimers
vacuum
radiation
dimers
excitation
Xenon
Radiators
radiators
Inert gases
xenon
Electrode
radiant flux density
Argon

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Engineering(all)
  • Applied Mathematics
  • Computational Mathematics

Cite this

Vacuum-ultraviolet excilamps with excitation by a barrier corona discharge. / Lomaev, M. I.; Skakun, V. S.; Tarasenko, V. F.; Shitts, D. V.; Erofeev, M. V.

In: Journal of Optical Technology (A Translation of Opticheskii Zhurnal), Vol. 79, No. 8, 31.08.2012, p. 503-508.

Research output: Contribution to journalArticle

Lomaev, M. I. ; Skakun, V. S. ; Tarasenko, V. F. ; Shitts, D. V. ; Erofeev, M. V. / Vacuum-ultraviolet excilamps with excitation by a barrier corona discharge. In: Journal of Optical Technology (A Translation of Opticheskii Zhurnal). 2012 ; Vol. 79, No. 8. pp. 503-508.
@article{45176fd588d04592b2187d5c68aa4c43,
title = "Vacuum-ultraviolet excilamps with excitation by a barrier corona discharge",
abstract = "This paper presents the results of studies of excilamps with excitation by a barrier corona discharge, which is characterized by inhomogeneous broadening of the electric field between the electrodes, one of which is covered by a dielectric. It is established that the radiation efficiency from inert-gas dimers under these excitation conditions reaches 45{\%} at 172 nm and 25{\%} at 146 nm. These studies were used as a basis for creating a radiator complex consisting of sealed xenon-dimer excilamps with a radiation power of up to 120 W, and a wide-aperture compact excilamp with argon pumped through the discharge volume. The radiation power density of the compact excilamp reached 10 mW/cm2 in the windowless regime.",
author = "Lomaev, {M. I.} and Skakun, {V. S.} and Tarasenko, {V. F.} and Shitts, {D. V.} and Erofeev, {M. V.}",
year = "2012",
month = "8",
day = "31",
language = "English",
volume = "79",
pages = "503--508",
journal = "Journal of Optical Technology (A Translation of Opticheskii Zhurnal)",
issn = "1070-9762",
publisher = "The Optical Society",
number = "8",

}

TY - JOUR

T1 - Vacuum-ultraviolet excilamps with excitation by a barrier corona discharge

AU - Lomaev, M. I.

AU - Skakun, V. S.

AU - Tarasenko, V. F.

AU - Shitts, D. V.

AU - Erofeev, M. V.

PY - 2012/8/31

Y1 - 2012/8/31

N2 - This paper presents the results of studies of excilamps with excitation by a barrier corona discharge, which is characterized by inhomogeneous broadening of the electric field between the electrodes, one of which is covered by a dielectric. It is established that the radiation efficiency from inert-gas dimers under these excitation conditions reaches 45% at 172 nm and 25% at 146 nm. These studies were used as a basis for creating a radiator complex consisting of sealed xenon-dimer excilamps with a radiation power of up to 120 W, and a wide-aperture compact excilamp with argon pumped through the discharge volume. The radiation power density of the compact excilamp reached 10 mW/cm2 in the windowless regime.

AB - This paper presents the results of studies of excilamps with excitation by a barrier corona discharge, which is characterized by inhomogeneous broadening of the electric field between the electrodes, one of which is covered by a dielectric. It is established that the radiation efficiency from inert-gas dimers under these excitation conditions reaches 45% at 172 nm and 25% at 146 nm. These studies were used as a basis for creating a radiator complex consisting of sealed xenon-dimer excilamps with a radiation power of up to 120 W, and a wide-aperture compact excilamp with argon pumped through the discharge volume. The radiation power density of the compact excilamp reached 10 mW/cm2 in the windowless regime.

UR - http://www.scopus.com/inward/record.url?scp=84868234819&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84868234819&partnerID=8YFLogxK

M3 - Article

AN - SCOPUS:84868234819

VL - 79

SP - 503

EP - 508

JO - Journal of Optical Technology (A Translation of Opticheskii Zhurnal)

JF - Journal of Optical Technology (A Translation of Opticheskii Zhurnal)

SN - 1070-9762

IS - 8

ER -