Vacuum-ultraviolet excilamps with excitation by a barrier corona discharge

M. I. Lomaev, V. S. Skakun, V. F. Tarasenko, D. V. Shitts, M. V. Erofeev

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Abstract

This paper presents the results of studies of excilamps with excitation by a barrier corona discharge, which is characterized by inhomogeneous broadening of the electric field between the electrodes, one of which is covered by a dielectric. It is established that the radiation efficiency from inert-gas dimers under these excitation conditions reaches 45% at 172 nm and 25% at 146 nm. These studies were used as a basis for creating a radiator complex consisting of sealed xenon-dimer excilamps with a radiation power of up to 120 W, and a wide-aperture compact excilamp with argon pumped through the discharge volume. The radiation power density of the compact excilamp reached 10 mW/cm2 in the windowless regime.

Original languageEnglish
Pages (from-to)503-508
Number of pages6
JournalJournal of Optical Technology (A Translation of Opticheskii Zhurnal)
Volume79
Issue number8
Publication statusPublished - 31 Aug 2012

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ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Engineering(all)
  • Applied Mathematics
  • Computational Mathematics

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