Vacuum arc ion and plasma source Raduga-5. Technological applications

A. I. Ryabchikov, I. B. Stepanov, S. V. Dektyarev, I. A. Shulepov, E. I. Lukonin, D. O. Sivin

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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Engineering & Materials Science

Chemical Compounds

Medicine & Life Sciences