Vacuum arc ion and plasma source Raduga-5. Technological applications

A. I. Ryabchikov, I. B. Stepanov, S. V. Dektyarev, I. A. Shulepov, E. I. Lukonin, D. O. Sivin

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The paper discusses examples of realizing the regimes of high-intensity and high-concentration ion implantation, and plasma deposition of coatings including the conditions of dynamic ion mixing using "Raduga-5", a source of accelerated ions and plasma based on the DC vacuum arc discharge. It is shown that when a target is treated with high average power beams, it is possible to dope a material at depths exceeding the projective ion range by an order of magnitude. Features of ion beam application at different stages of ion plasma deposition of coatings are considered. Examples are given for the formation of wide transition layers between the coating and the substrate under conditions of intensive ion mixing. Mechanisms of change in the properties of the coatings formed with decreasing microparticle fractions in the arc plasma stream are considered.

Original languageEnglish
Title of host publication5th Korea-Russia International Symposium on Science and Technology - Proceedings: KORUS 2001
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages380-383
Number of pages4
Volume1
ISBN (Print)0780370082, 9780780370081
DOIs
Publication statusPublished - 2001
Event5th Korea-Russia International Symposium on Science and Technology, KORUS 2001 - Tomsk, Russian Federation
Duration: 26 Jun 20013 Jul 2001

Other

Other5th Korea-Russia International Symposium on Science and Technology, KORUS 2001
CountryRussian Federation
CityTomsk
Period26.6.013.7.01

Fingerprint

Plasma sources
Ion sources
Vacuum
Ions
Plasma deposition
Coatings
Plasmas
Ion implantation
Ion beams
Substrates

Keywords

  • coatings
  • ion current
  • plasma filter
  • Vacuum-arc

ASJC Scopus subject areas

  • Clinical Biochemistry
  • Computer Networks and Communications
  • Biotechnology
  • Civil and Structural Engineering
  • Mechanics of Materials
  • Electronic, Optical and Magnetic Materials
  • Materials Chemistry
  • Surfaces, Coatings and Films

Cite this

Ryabchikov, A. I., Stepanov, I. B., Dektyarev, S. V., Shulepov, I. A., Lukonin, E. I., & Sivin, D. O. (2001). Vacuum arc ion and plasma source Raduga-5. Technological applications. In 5th Korea-Russia International Symposium on Science and Technology - Proceedings: KORUS 2001 (Vol. 1, pp. 380-383). [975158] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/KORUS.2001.975158

Vacuum arc ion and plasma source Raduga-5. Technological applications. / Ryabchikov, A. I.; Stepanov, I. B.; Dektyarev, S. V.; Shulepov, I. A.; Lukonin, E. I.; Sivin, D. O.

5th Korea-Russia International Symposium on Science and Technology - Proceedings: KORUS 2001. Vol. 1 Institute of Electrical and Electronics Engineers Inc., 2001. p. 380-383 975158.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Ryabchikov, AI, Stepanov, IB, Dektyarev, SV, Shulepov, IA, Lukonin, EI & Sivin, DO 2001, Vacuum arc ion and plasma source Raduga-5. Technological applications. in 5th Korea-Russia International Symposium on Science and Technology - Proceedings: KORUS 2001. vol. 1, 975158, Institute of Electrical and Electronics Engineers Inc., pp. 380-383, 5th Korea-Russia International Symposium on Science and Technology, KORUS 2001, Tomsk, Russian Federation, 26.6.01. https://doi.org/10.1109/KORUS.2001.975158
Ryabchikov AI, Stepanov IB, Dektyarev SV, Shulepov IA, Lukonin EI, Sivin DO. Vacuum arc ion and plasma source Raduga-5. Technological applications. In 5th Korea-Russia International Symposium on Science and Technology - Proceedings: KORUS 2001. Vol. 1. Institute of Electrical and Electronics Engineers Inc. 2001. p. 380-383. 975158 https://doi.org/10.1109/KORUS.2001.975158
Ryabchikov, A. I. ; Stepanov, I. B. ; Dektyarev, S. V. ; Shulepov, I. A. ; Lukonin, E. I. ; Sivin, D. O. / Vacuum arc ion and plasma source Raduga-5. Technological applications. 5th Korea-Russia International Symposium on Science and Technology - Proceedings: KORUS 2001. Vol. 1 Institute of Electrical and Electronics Engineers Inc., 2001. pp. 380-383
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