Vacuum arc filtered metal plasma application in hybrid technologies of ion-beam and plasma material processing

I. B. Stepanov, A. I. Ryabchikov, N. A. Nochovnaya, Y. P. Sharkeev, I. A. Shulepov, I. A. Ryabchikov, Denis Olegovich Sivin, S. V. Fortuna

Research output: Contribution to journalArticle

6 Citations (Scopus)

Abstract

In this paper the latest results obtained for (Ti, Al)N, TiSiB coating deposition using a hybrid technology are presented. This technology includes several approaches. For sample pretreatment the repetitively pulsed high-current ion-beam and high-frequency short-pulsed metal plasma immersion ion surface treatment were used. An intermediate layer between coating and sample surface was formed by metal ion implantation using a high-current vacuum ion-beam and plasma source "Raduga-5". The vacuum arc microdroplet-filtered metal plasma coating deposition was realized under ion mixing using high-frequency short-pulsed plasma immersion ion technology. It was experimentally shown that for deposition of TiAlN coatings, mono (Ti, Al) and multi-element (TiAl) cathodes can be used. Phase and elemental composition, structural state, and mechanical properties of (Ti,Al)N and TiSiB coatings were observed, and they are presented in this paper.

Original languageEnglish
Pages (from-to)8596-8600
Number of pages5
JournalSurface and Coatings Technology
Volume201
Issue number19-20 SPEC. ISS.
DOIs
Publication statusPublished - 5 Aug 2007

Fingerprint

Plasma applications
Ion beams
arcs
Metals
ion beams
Vacuum
Plasmas
coatings
Coatings
vacuum
Processing
metals
Ions
submerging
high current
ions
Plasma sources
surface treatment
Ion implantation
pretreatment

Keywords

  • Coating deposition
  • DC vacuum arc
  • Hybrid technologies
  • Microdroplet-filtered metal plasma

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Condensed Matter Physics
  • Surfaces and Interfaces

Cite this

Vacuum arc filtered metal plasma application in hybrid technologies of ion-beam and plasma material processing. / Stepanov, I. B.; Ryabchikov, A. I.; Nochovnaya, N. A.; Sharkeev, Y. P.; Shulepov, I. A.; Ryabchikov, I. A.; Sivin, Denis Olegovich; Fortuna, S. V.

In: Surface and Coatings Technology, Vol. 201, No. 19-20 SPEC. ISS., 05.08.2007, p. 8596-8600.

Research output: Contribution to journalArticle

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AU - Ryabchikov, A. I.

AU - Nochovnaya, N. A.

AU - Sharkeev, Y. P.

AU - Shulepov, I. A.

AU - Ryabchikov, I. A.

AU - Sivin, Denis Olegovich

AU - Fortuna, S. V.

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