Vacuum arc filtered metal plasma application in hybrid technologies of ion-beam and plasma material processing

I. B. Stepanov, A. I. Ryabchikov, N. A. Nochovnaya, Y. P. Sharkeev, I. A. Shulepov, I. A. Ryabchikov, Denis Olegovich Sivin, S. V. Fortuna

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7 Citations (Scopus)


In this paper the latest results obtained for (Ti, Al)N, TiSiB coating deposition using a hybrid technology are presented. This technology includes several approaches. For sample pretreatment the repetitively pulsed high-current ion-beam and high-frequency short-pulsed metal plasma immersion ion surface treatment were used. An intermediate layer between coating and sample surface was formed by metal ion implantation using a high-current vacuum ion-beam and plasma source "Raduga-5". The vacuum arc microdroplet-filtered metal plasma coating deposition was realized under ion mixing using high-frequency short-pulsed plasma immersion ion technology. It was experimentally shown that for deposition of TiAlN coatings, mono (Ti, Al) and multi-element (TiAl) cathodes can be used. Phase and elemental composition, structural state, and mechanical properties of (Ti,Al)N and TiSiB coatings were observed, and they are presented in this paper.

Original languageEnglish
Pages (from-to)8596-8600
Number of pages5
JournalSurface and Coatings Technology
Issue number19-20 SPEC. ISS.
Publication statusPublished - 5 Aug 2007



  • Coating deposition
  • DC vacuum arc
  • Hybrid technologies
  • Microdroplet-filtered metal plasma

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Condensed Matter Physics
  • Surfaces and Interfaces

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