UV and VUV excilamps excited by glow, barrier and capacitive discharges

V. F. Tarasenko, E. B. Chernov, M. V. Erofeev, M. I. Lomaev, A. N. Panchenko, V. S. Skakun, E. A. Sosnin, D. V. Shitz

Research output: Contribution to journalArticlepeer-review

34 Citations (Scopus)


An investigation was made into the characteristics of XeCl (λ ∼ 308 nm), KrCl (λ ∼ 222 nm) and XeI (λ ∼ 253 nm) capacitive HF discharge and glow discharge excilamps. High fluorescence efficiency of the exciplex molecules has been obtained from excilamps with simple design under capacitive HF discharge excitation. A fluorescence efficiency with respect to the electrical power deposition of up to ∼ 12% has been measured. The study of XeCl, KrCl and XeI excilamps has shown that it is possible to create sealed-off excilamps with gas mixture lifetimes of over 1000 hours.

Original languageEnglish
JournalApplied Physics A: Materials Science and Processing
Issue number7
Publication statusPublished - 1 Jan 1999

ASJC Scopus subject areas

  • Chemistry(all)
  • Materials Science(all)

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