Use of thin film of a Co15Ti40N35 alloy for CVD catalytic growth of carbon nanotubes

D. G. Gromov, S. V. Dubkov, A. A. Pavlov, S. N. Skorik, A. Yu Trifonov, A. S. Shulyatev, Yu P. Shaman, B. N. Rygalin

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

It is shown that multiwalled carbon nanotubes can be grown on the catalytic surface of a Co–Ti–N alloy with low (~10 at %) cobalt content by the conventional method of chemical deposition from acetylene. Adding nitrogen to the composition of the Co–Ti contributes the formation of the TiN compound and extrusion of Co onto the surface where it makes a catalytic effect for CNT growth. It was found that the tubes begin growth at a temperature of 400°C. It is shown by studies using Raman spectroscopy that the quality of CNT improves with increasing temperature.

Original languageEnglish
Pages (from-to)98-104
Number of pages7
JournalRussian Microelectronics
Volume45
Issue number2
DOIs
Publication statusPublished - 1 Mar 2016

Fingerprint

Carbon Nanotubes
Chemical vapor deposition
Carbon nanotubes
carbon nanotubes
vapor deposition
Thin films
Acetylene
Multiwalled carbon nanotubes (MWCN)
thin films
Cobalt
Extrusion
Raman spectroscopy
Nitrogen
acetylene
Temperature
cobalt
Chemical analysis
tubes
nitrogen
temperature

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Materials Chemistry
  • Condensed Matter Physics

Cite this

Gromov, D. G., Dubkov, S. V., Pavlov, A. A., Skorik, S. N., Trifonov, A. Y., Shulyatev, A. S., ... Rygalin, B. N. (2016). Use of thin film of a Co15Ti40N35 alloy for CVD catalytic growth of carbon nanotubes. Russian Microelectronics, 45(2), 98-104. https://doi.org/10.1134/S1063739716020050

Use of thin film of a Co15Ti40N35 alloy for CVD catalytic growth of carbon nanotubes. / Gromov, D. G.; Dubkov, S. V.; Pavlov, A. A.; Skorik, S. N.; Trifonov, A. Yu; Shulyatev, A. S.; Shaman, Yu P.; Rygalin, B. N.

In: Russian Microelectronics, Vol. 45, No. 2, 01.03.2016, p. 98-104.

Research output: Contribution to journalArticle

Gromov, DG, Dubkov, SV, Pavlov, AA, Skorik, SN, Trifonov, AY, Shulyatev, AS, Shaman, YP & Rygalin, BN 2016, 'Use of thin film of a Co15Ti40N35 alloy for CVD catalytic growth of carbon nanotubes', Russian Microelectronics, vol. 45, no. 2, pp. 98-104. https://doi.org/10.1134/S1063739716020050
Gromov, D. G. ; Dubkov, S. V. ; Pavlov, A. A. ; Skorik, S. N. ; Trifonov, A. Yu ; Shulyatev, A. S. ; Shaman, Yu P. ; Rygalin, B. N. / Use of thin film of a Co15Ti40N35 alloy for CVD catalytic growth of carbon nanotubes. In: Russian Microelectronics. 2016 ; Vol. 45, No. 2. pp. 98-104.
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