Use of thin film of a Co15Ti40N35 alloy for CVD catalytic growth of carbon nanotubes

D. G. Gromov, S. V. Dubkov, A. A. Pavlov, S. N. Skorik, A. Yu Trifonov, A. S. Shulyatev, Yu P. Shaman, B. N. Rygalin

Research output: Contribution to journalArticlepeer-review

4 Citations (Scopus)


It is shown that multiwalled carbon nanotubes can be grown on the catalytic surface of a Co–Ti–N alloy with low (~10 at %) cobalt content by the conventional method of chemical deposition from acetylene. Adding nitrogen to the composition of the Co–Ti contributes the formation of the TiN compound and extrusion of Co onto the surface where it makes a catalytic effect for CNT growth. It was found that the tubes begin growth at a temperature of 400°C. It is shown by studies using Raman spectroscopy that the quality of CNT improves with increasing temperature.

Original languageEnglish
Pages (from-to)98-104
Number of pages7
JournalRussian Microelectronics
Issue number2
Publication statusPublished - 1 Mar 2016

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Materials Chemistry
  • Condensed Matter Physics

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