Unfiltered aluminium vacuum arc plasma application for highfrequency short-pulse plasma immersion ion implantation

Alexander Ryabchikov, Sivin Denis, Anna Bumagina, Evgeniy Bolbasov, Natalya Daneikina

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

This paper is devoted to the studying of the dynamical changes in the density of aluminium microparticles (MPs) on the substrate surface made of stainless steel, immersed in vacuum arc plasma, at high-frequency short-pulse negative bias potential. It is shown experimentally that the density of aluminium MPs on the substrate surface is decreased dynamically by 3 orders when the treatment time is increased from 15 s to 3 min at the bias potential -2 kV. A possibility of the application of MPs unfiltered vacuum arc plasma for high-frequency short-pulse plasma immersion ion implantation to form the intermetallic layers is discussed.

Original languageEnglish
Title of host publicationAdvanced Materials Research
Pages155-160
Number of pages6
Volume880
DOIs
Publication statusPublished - 2014
Event10th International Conference on Prospects of Fundamental Sciences Development, PFSD-2013 - Tomsk, Russian Federation
Duration: 23 Apr 201326 Apr 2013

Publication series

NameAdvanced Materials Research
Volume880
ISSN (Print)10226680

Other

Other10th International Conference on Prospects of Fundamental Sciences Development, PFSD-2013
CountryRussian Federation
CityTomsk
Period23.4.1326.4.13

Keywords

  • Macroparticles
  • Metal plasma
  • Negative high-frequency short-pulsed bias
  • Vacuum-arc

ASJC Scopus subject areas

  • Engineering(all)

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