Unconventional methods of pulsed-periodic ion-beam and ion-plasma treatment of materials

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The article reviews studies on the development of new methods of ion treatment of materials. New approaches are considered to multielement implantation on the basis of pulsed-periodic formation of composition-controlled ion fluxes. Various ways of obtaining high implant concentrations and forming thick and thin coatings by pulsed-periodic irradiation of materials with with ion beams and plasma streams alternating in time are discussed. Unconventional methods of treatment of inside surfaces of products are considered.

Original languageEnglish
Pages (from-to)558-566
Number of pages9
JournalRussian Physics Journal
Issue number6
Publication statusPublished - Jun 1994


ASJC Scopus subject areas

  • Physics and Astronomy(all)

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