Abstract
The article reports on dc pulsed reactive sputtering of two-phase single layer Al-O-N nanocomposite films using dual magnetron in a mixture of N 2+O 2 with pulsed inlet of oxygen. Two kinds of nanocomposite films were sputtered: (1) nc-AlN/a-(Al-O-N) film and (2) nc-(γ-Al 2O 3)/a-(Al-O-N) nanocomposite film; here nc- and a- denotes the nanocrystalline and amorphous phase, respectively. The transition from the nc-AlN/a-(Al-O-N) nanocomposite to the nc-(γ-Al 2O 3)/a-(Al-O-N) nanocomposite was controlled by the length of the period of oxygen pulses T O2. It was found that both nanocomposites are highly elastic films with relatively high hardness H=15 to 20GPa, low effective Young's modulus E * satisfying the condition that the ratio H/E *>0.1, high elastic recovery W e>60% and high resistance to cracking in bending. Correlations between the film structure and its mechanical properties are discussed in detail.
| Original language | English |
|---|---|
| Pages (from-to) | 4230-4234 |
| Number of pages | 5 |
| Journal | Surface and Coatings Technology |
| Volume | 206 |
| Issue number | 19-20 |
| DOIs | |
| Publication status | Published - 25 May 2012 |
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Keywords
- Al-based composites
- Mechanical properties
- Oxynitride
- Pulsed inlet of oxygen
- Reactive sputtering
- Two-phase nanocomposites
ASJC Scopus subject areas
- Chemistry(all)
- Condensed Matter Physics
- Surfaces and Interfaces
- Surfaces, Coatings and Films
- Materials Chemistry
Cite this
Two-phase single layer Al-O-N nanocomposite films with enhanced resistance to cracking. / Musil, J.; Jílek, R.; Meissner, M.; Tölg, T.; Čerstvý, R.
In: Surface and Coatings Technology, Vol. 206, No. 19-20, 25.05.2012, p. 4230-4234.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Two-phase single layer Al-O-N nanocomposite films with enhanced resistance to cracking
AU - Musil, J.
AU - Jílek, R.
AU - Meissner, M.
AU - Tölg, T.
AU - Čerstvý, R.
PY - 2012/5/25
Y1 - 2012/5/25
N2 - The article reports on dc pulsed reactive sputtering of two-phase single layer Al-O-N nanocomposite films using dual magnetron in a mixture of N 2+O 2 with pulsed inlet of oxygen. Two kinds of nanocomposite films were sputtered: (1) nc-AlN/a-(Al-O-N) film and (2) nc-(γ-Al 2O 3)/a-(Al-O-N) nanocomposite film; here nc- and a- denotes the nanocrystalline and amorphous phase, respectively. The transition from the nc-AlN/a-(Al-O-N) nanocomposite to the nc-(γ-Al 2O 3)/a-(Al-O-N) nanocomposite was controlled by the length of the period of oxygen pulses T O2. It was found that both nanocomposites are highly elastic films with relatively high hardness H=15 to 20GPa, low effective Young's modulus E * satisfying the condition that the ratio H/E *>0.1, high elastic recovery W e>60% and high resistance to cracking in bending. Correlations between the film structure and its mechanical properties are discussed in detail.
AB - The article reports on dc pulsed reactive sputtering of two-phase single layer Al-O-N nanocomposite films using dual magnetron in a mixture of N 2+O 2 with pulsed inlet of oxygen. Two kinds of nanocomposite films were sputtered: (1) nc-AlN/a-(Al-O-N) film and (2) nc-(γ-Al 2O 3)/a-(Al-O-N) nanocomposite film; here nc- and a- denotes the nanocrystalline and amorphous phase, respectively. The transition from the nc-AlN/a-(Al-O-N) nanocomposite to the nc-(γ-Al 2O 3)/a-(Al-O-N) nanocomposite was controlled by the length of the period of oxygen pulses T O2. It was found that both nanocomposites are highly elastic films with relatively high hardness H=15 to 20GPa, low effective Young's modulus E * satisfying the condition that the ratio H/E *>0.1, high elastic recovery W e>60% and high resistance to cracking in bending. Correlations between the film structure and its mechanical properties are discussed in detail.
KW - Al-based composites
KW - Mechanical properties
KW - Oxynitride
KW - Pulsed inlet of oxygen
KW - Reactive sputtering
KW - Two-phase nanocomposites
UR - http://www.scopus.com/inward/record.url?scp=84861460256&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84861460256&partnerID=8YFLogxK
U2 - 10.1016/j.surfcoat.2012.04.028
DO - 10.1016/j.surfcoat.2012.04.028
M3 - Article
VL - 206
SP - 4230
EP - 4234
JO - Surface and Coatings Technology
JF - Surface and Coatings Technology
SN - 0257-8972
IS - 19-20
ER -