Two-phase single layer Al-O-N nanocomposite films with enhanced resistance to cracking

J. Musil, R. Jílek, M. Meissner, T. Tölg, R. Čerstvý

Research output: Contribution to journalArticle

36 Citations (Scopus)

Abstract

The article reports on dc pulsed reactive sputtering of two-phase single layer Al-O-N nanocomposite films using dual magnetron in a mixture of N 2+O 2 with pulsed inlet of oxygen. Two kinds of nanocomposite films were sputtered: (1) nc-AlN/a-(Al-O-N) film and (2) nc-(γ-Al 2O 3)/a-(Al-O-N) nanocomposite film; here nc- and a- denotes the nanocrystalline and amorphous phase, respectively. The transition from the nc-AlN/a-(Al-O-N) nanocomposite to the nc-(γ-Al 2O 3)/a-(Al-O-N) nanocomposite was controlled by the length of the period of oxygen pulses T O2. It was found that both nanocomposites are highly elastic films with relatively high hardness H=15 to 20GPa, low effective Young's modulus E * satisfying the condition that the ratio H/E *>0.1, high elastic recovery W e>60% and high resistance to cracking in bending. Correlations between the film structure and its mechanical properties are discussed in detail.

Original languageEnglish
Pages (from-to)4230-4234
Number of pages5
JournalSurface and Coatings Technology
Volume206
Issue number19-20
DOIs
Publication statusPublished - 25 May 2012

Fingerprint

Nanocomposite films
Nanocomposites
nanocomposites
Oxygen
Reactive sputtering
Elastic moduli
Hardness
Recovery
Mechanical properties
high resistance
oxygen
modulus of elasticity
hardness
sputtering
recovery
mechanical properties
pulses

Keywords

  • Al-based composites
  • Mechanical properties
  • Oxynitride
  • Pulsed inlet of oxygen
  • Reactive sputtering
  • Two-phase nanocomposites

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry

Cite this

Two-phase single layer Al-O-N nanocomposite films with enhanced resistance to cracking. / Musil, J.; Jílek, R.; Meissner, M.; Tölg, T.; Čerstvý, R.

In: Surface and Coatings Technology, Vol. 206, No. 19-20, 25.05.2012, p. 4230-4234.

Research output: Contribution to journalArticle

Musil, J. ; Jílek, R. ; Meissner, M. ; Tölg, T. ; Čerstvý, R. / Two-phase single layer Al-O-N nanocomposite films with enhanced resistance to cracking. In: Surface and Coatings Technology. 2012 ; Vol. 206, No. 19-20. pp. 4230-4234.
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