Two-phase single layer Al-O-N nanocomposite films with enhanced resistance to cracking

Abstract

The article reports on dc pulsed reactive sputtering of two-phase single layer Al-O-N nanocomposite films using dual magnetron in a mixture of N ₂+O ₂ with pulsed inlet of oxygen. Two kinds of nanocomposite films were sputtered: (1) nc-AlN/a-(Al-O-N) film and (2) nc-(γ-Al ₂O ₃)/a-(Al-O-N) nanocomposite film; here nc- and a- denotes the nanocrystalline and amorphous phase, respectively. The transition from the nc-AlN/a-(Al-O-N) nanocomposite to the nc-(γ-Al ₂O ₃)/a-(Al-O-N) nanocomposite was controlled by the length of the period of oxygen pulses T _O2. It was found that both nanocomposites are highly elastic films with relatively high hardness H=15 to 20GPa, low effective Young's modulus E ^* satisfying the condition that the ratio H/E ^*>0.1, high elastic recovery W _e>60% and high resistance to cracking in bending. Correlations between the film structure and its mechanical properties are discussed in detail.

Original language	English
Pages (from-to)	4230-4234
Number of pages	5
Journal	Surface and Coatings Technology
Volume	206
Issue number	19-20
DOIs	https://doi.org/10.1016/j.surfcoat.2012.04.028
Publication status	Published - 25 May 2012

Keywords

Al-based composites
Mechanical properties
Oxynitride
Pulsed inlet of oxygen
Reactive sputtering
Two-phase nanocomposites

ASJC Scopus subject areas

Chemistry(all)
Condensed Matter Physics
Surfaces and Interfaces
Surfaces, Coatings and Films
Materials Chemistry

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10.1016/j.surfcoat.2012.04.028

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@article{243f0dd9c457453d9c4aab877fd5b812,

title = "Two-phase single layer Al-O-N nanocomposite films with enhanced resistance to cracking",

abstract = "The article reports on dc pulsed reactive sputtering of two-phase single layer Al-O-N nanocomposite films using dual magnetron in a mixture of N 2+O 2 with pulsed inlet of oxygen. Two kinds of nanocomposite films were sputtered: (1) nc-AlN/a-(Al-O-N) film and (2) nc-(γ-Al 2O 3)/a-(Al-O-N) nanocomposite film; here nc- and a- denotes the nanocrystalline and amorphous phase, respectively. The transition from the nc-AlN/a-(Al-O-N) nanocomposite to the nc-(γ-Al 2O 3)/a-(Al-O-N) nanocomposite was controlled by the length of the period of oxygen pulses T O2. It was found that both nanocomposites are highly elastic films with relatively high hardness H=15 to 20GPa, low effective Young's modulus E * satisfying the condition that the ratio H/E *>0.1, high elastic recovery W e>60% and high resistance to cracking in bending. Correlations between the film structure and its mechanical properties are discussed in detail.",

keywords = "Al-based composites, Mechanical properties, Oxynitride, Pulsed inlet of oxygen, Reactive sputtering, Two-phase nanocomposites",

author = "J. Musil and R. J{\'i}lek and M. Meissner and T. T{\"o}lg and R. {\v C}erstv{\'y}",

year = "2012",

month = may,

day = "25",

doi = "10.1016/j.surfcoat.2012.04.028",

language = "English",

volume = "206",

pages = "4230--4234",

journal = "Surface and Coatings Technology",

issn = "0257-8972",

publisher = "Elsevier",

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T1 - Two-phase single layer Al-O-N nanocomposite films with enhanced resistance to cracking

AU - Musil, J.

AU - Jílek, R.

AU - Meissner, M.

AU - Tölg, T.

AU - Čerstvý, R.

PY - 2012/5/25

Y1 - 2012/5/25

N2 - The article reports on dc pulsed reactive sputtering of two-phase single layer Al-O-N nanocomposite films using dual magnetron in a mixture of N 2+O 2 with pulsed inlet of oxygen. Two kinds of nanocomposite films were sputtered: (1) nc-AlN/a-(Al-O-N) film and (2) nc-(γ-Al 2O 3)/a-(Al-O-N) nanocomposite film; here nc- and a- denotes the nanocrystalline and amorphous phase, respectively. The transition from the nc-AlN/a-(Al-O-N) nanocomposite to the nc-(γ-Al 2O 3)/a-(Al-O-N) nanocomposite was controlled by the length of the period of oxygen pulses T O2. It was found that both nanocomposites are highly elastic films with relatively high hardness H=15 to 20GPa, low effective Young's modulus E * satisfying the condition that the ratio H/E *>0.1, high elastic recovery W e>60% and high resistance to cracking in bending. Correlations between the film structure and its mechanical properties are discussed in detail.

AB - The article reports on dc pulsed reactive sputtering of two-phase single layer Al-O-N nanocomposite films using dual magnetron in a mixture of N 2+O 2 with pulsed inlet of oxygen. Two kinds of nanocomposite films were sputtered: (1) nc-AlN/a-(Al-O-N) film and (2) nc-(γ-Al 2O 3)/a-(Al-O-N) nanocomposite film; here nc- and a- denotes the nanocrystalline and amorphous phase, respectively. The transition from the nc-AlN/a-(Al-O-N) nanocomposite to the nc-(γ-Al 2O 3)/a-(Al-O-N) nanocomposite was controlled by the length of the period of oxygen pulses T O2. It was found that both nanocomposites are highly elastic films with relatively high hardness H=15 to 20GPa, low effective Young's modulus E * satisfying the condition that the ratio H/E *>0.1, high elastic recovery W e>60% and high resistance to cracking in bending. Correlations between the film structure and its mechanical properties are discussed in detail.

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KW - Oxynitride

KW - Pulsed inlet of oxygen

KW - Reactive sputtering

KW - Two-phase nanocomposites

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