Abstract
The article reports on dc pulsed reactive sputtering of two-phase single layer Al-O-N nanocomposite films using dual magnetron in a mixture of N 2+O 2 with pulsed inlet of oxygen. Two kinds of nanocomposite films were sputtered: (1) nc-AlN/a-(Al-O-N) film and (2) nc-(γ-Al 2O 3)/a-(Al-O-N) nanocomposite film; here nc- and a- denotes the nanocrystalline and amorphous phase, respectively. The transition from the nc-AlN/a-(Al-O-N) nanocomposite to the nc-(γ-Al 2O 3)/a-(Al-O-N) nanocomposite was controlled by the length of the period of oxygen pulses T O2. It was found that both nanocomposites are highly elastic films with relatively high hardness H=15 to 20GPa, low effective Young's modulus E * satisfying the condition that the ratio H/E *>0.1, high elastic recovery W e>60% and high resistance to cracking in bending. Correlations between the film structure and its mechanical properties are discussed in detail.
| Original language | English |
|---|---|
| Pages (from-to) | 4230-4234 |
| Number of pages | 5 |
| Journal | Surface and Coatings Technology |
| Volume | 206 |
| Issue number | 19-20 |
| DOIs | |
| Publication status | Published - 25 May 2012 |
Keywords
- Al-based composites
- Mechanical properties
- Oxynitride
- Pulsed inlet of oxygen
- Reactive sputtering
- Two-phase nanocomposites
ASJC Scopus subject areas
- Chemistry(all)
- Condensed Matter Physics
- Surfaces and Interfaces
- Surfaces, Coatings and Films
- Materials Chemistry