Two-phase single layer Al-O-N nanocomposite films with enhanced resistance to cracking

J. Musil, R. Jílek, M. Meissner, T. Tölg, R. Čerstvý

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39 Citations (Scopus)


The article reports on dc pulsed reactive sputtering of two-phase single layer Al-O-N nanocomposite films using dual magnetron in a mixture of N 2+O 2 with pulsed inlet of oxygen. Two kinds of nanocomposite films were sputtered: (1) nc-AlN/a-(Al-O-N) film and (2) nc-(γ-Al 2O 3)/a-(Al-O-N) nanocomposite film; here nc- and a- denotes the nanocrystalline and amorphous phase, respectively. The transition from the nc-AlN/a-(Al-O-N) nanocomposite to the nc-(γ-Al 2O 3)/a-(Al-O-N) nanocomposite was controlled by the length of the period of oxygen pulses T O2. It was found that both nanocomposites are highly elastic films with relatively high hardness H=15 to 20GPa, low effective Young's modulus E * satisfying the condition that the ratio H/E *>0.1, high elastic recovery W e>60% and high resistance to cracking in bending. Correlations between the film structure and its mechanical properties are discussed in detail.

Original languageEnglish
Pages (from-to)4230-4234
Number of pages5
JournalSurface and Coatings Technology
Issue number19-20
Publication statusPublished - 25 May 2012


  • Al-based composites
  • Mechanical properties
  • Oxynitride
  • Pulsed inlet of oxygen
  • Reactive sputtering
  • Two-phase nanocomposites

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry

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