Tribological and mechanical properties of diamond films synthesized with high methane concentration

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Ultrananocrystalline diamond films are synthesized on Si substrate by HFCVD method with a high methane concentration (up to 23.1 vol%) in the gas mixture. The morphology and structural properties of the grown diamond films are analyzed using scanning electron microscope (SEM), atomic force microscope (AFM), X-ray diffraction and Raman spectroscopy. It is shown that the surface roughness, crystallite size, hardness and friction coefficient of the obtained films decrease with increasing methane content in the gas mixture. The relationship between the CoF and the wear rate of diamond films is also analyzed. It is found that by reducing the CoF from 0.11 to 0.067, wear rate of the obtained films increases from 0.08 to 7.11 × 10−10 m3 N−1 m−1.

Original languageEnglish
Article number105057
JournalInternational Journal of Refractory Metals and Hard Materials
Publication statusPublished - 1 Dec 2019



  • CoF
  • Ultrananocrystalline diamond film
  • Wear rate

ASJC Scopus subject areas

  • Ceramics and Composites
  • Mechanics of Materials
  • Mechanical Engineering
  • Metals and Alloys
  • Materials Chemistry

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