Transparent Zr-Al-O oxide coatings with enhanced resistance to cracking

J. Musil, J. Sklenka, R. Cerstvy

Research output: Contribution to journalArticle

43 Citations (Scopus)

Abstract

The article reports on structure, transparency and mechanical properties of Zr-Al-O oxide thin films with Zr/Al>1 produced by reactive DC pulse dual magnetron sputtering. Special attention is devoted to the formation of transparent Zr-Al-O oxide films in the transition mode of sputtering and their unique properties. It is shown that (i) the transparent Zr-Al-O films can be deposited in the transition mode of sputtering with a high deposition rate a D achieving up to 80nm/min at relatively low value of the magnetron target power density W t≈45 W/cm 2, (ii) the Zr-Al-O films sputtered in the transition and oxides mode of sputtering are highly elastic and exhibit relatively high hardness (typically H≈18 to 19GPa), low effective Young's modulus E * satisfying the ratio H/E *>0.1 and high elastic recovery W e up to 78%, and highly elastic Zr-Al-O oxide films with H/E *>0.1 exhibit an enhanced resistance to cracking.

Original languageEnglish
Pages (from-to)2105-2109
Number of pages5
JournalSurface and Coatings Technology
Volume206
Issue number8-9
DOIs
Publication statusPublished - 15 Jan 2012

Fingerprint

Oxides
Oxide films
Sputtering
sputtering
coatings
Coatings
oxides
oxide films
Deposition rates
Magnetron sputtering
Transparency
radiant flux density
modulus of elasticity
magnetron sputtering
hardness
Elastic moduli
direct current
Hardness
recovery
mechanical properties

Keywords

  • DC pulsed reactive sputtering
  • Dual magnetron
  • Mechanical properties
  • Optical properties
  • Resistance to cracking
  • Two-phase oxide

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry

Cite this

Transparent Zr-Al-O oxide coatings with enhanced resistance to cracking. / Musil, J.; Sklenka, J.; Cerstvy, R.

In: Surface and Coatings Technology, Vol. 206, No. 8-9, 15.01.2012, p. 2105-2109.

Research output: Contribution to journalArticle

Musil, J. ; Sklenka, J. ; Cerstvy, R. / Transparent Zr-Al-O oxide coatings with enhanced resistance to cracking. In: Surface and Coatings Technology. 2012 ; Vol. 206, No. 8-9. pp. 2105-2109.
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