Titanium macroparticle fraction suppression with steered arc and negative pulse biasing

A. I. Ryabchikov, D. O. Sivin, P. S. Ananin, A. E. Shevelev, I. E. Shulepov

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)

Abstract

The result of experimental study of macroparticles (MPs) accumulation on negatively biased substrate immersed in DC vacuum arc titanium plasma are presented. The influence of normal and tangential to cathode surface magnetic field and high-frequency short-pulsed negative bias has been investigated. It was shown that the application of tangential to cathode surface magnetic field instead of normal one allows to reduce titanium MP surface density 2 fold. Applying of short-pulsed bias leads to decreasing of total MPs surface density after 3 minutes of ion-plasma treatment 30 fold.

Original languageEnglish
Pages (from-to)406-410
Number of pages5
JournalJournal of Industrial Pollution Control
Volume32
Issue number2
Publication statusPublished - 2016

Keywords

  • Ionized plasma
  • Macroparticles accumulation
  • Magnetic field
  • Modeling
  • Titanium plasma

ASJC Scopus subject areas

  • Water Science and Technology
  • Ocean Engineering
  • Pollution
  • Fluid Flow and Transfer Processes
  • Atmospheric Science

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