Abstract
ZrN/TiN nanostructures with bilayer period of 50 nm were deposited on different substrates (Si and high speed steel) by pulsed reactive magnetron sputtering (RPMS) and radiofrequency beam assisted pulsed laser deposition (RF-PLD). Elemental composition, phase composition texture, roughness, microhardness, bilayer period, thickness and adhesion were determined using Auger Electron Spectroscopy (AES), X-ray diffraction (XRD) and Atomic Force Microscopy (AFM) techniques, Vickers microhardness measurements and scratch test. Compared to ZrN/TiN nanostructures deposited by RF-PLD, the coatings deposited by PRMS exhibit higher microhardness and smaller surface roughness. No matter the deposition method, ZrN and TiN monolayers were almost stoichiometric (N / Zr = 0.9, N / Ti = 1.1). The TiN/ZrN and ZrN/TiN multilayers with bilayer period of 32 nm were the hardest (≈ 32 and 30 GPa) and exhibited the smallest roughness.
| Original language | English |
|---|---|
| Pages (from-to) | 6505-6510 |
| Number of pages | 6 |
| Journal | Surface and Coatings Technology |
| Volume | 200 |
| Issue number | 22-23 SPEC. ISS. |
| DOIs | |
| Publication status | Published - 20 Jun 2006 |
| Externally published | Yes |
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Keywords
- Heterostructures
- Nanostructured coatings
- Physical, Microchemical and Mechanical properties
- ZrN/TiN
ASJC Scopus subject areas
- Chemistry(all)
- Condensed Matter Physics
- Surfaces and Interfaces
- Surfaces, Coatings and Films
- Materials Chemistry
Cite this
TiN/ZrN heterostructures deposition and characterisation. / Braic, M.; Balaceanu, M.; Vladescu, A.; Kiss, A.; Braic, V.; Purice, A.; Dinescu, G.; Scarisoreanu, N.; Stokker-Cheregi, F.; Moldovan, A.; Birjega, R.; Dinescu, M.
In: Surface and Coatings Technology, Vol. 200, No. 22-23 SPEC. ISS., 20.06.2006, p. 6505-6510.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - TiN/ZrN heterostructures deposition and characterisation
AU - Braic, M.
AU - Balaceanu, M.
AU - Vladescu, A.
AU - Kiss, A.
AU - Braic, V.
AU - Purice, A.
AU - Dinescu, G.
AU - Scarisoreanu, N.
AU - Stokker-Cheregi, F.
AU - Moldovan, A.
AU - Birjega, R.
AU - Dinescu, M.
PY - 2006/6/20
Y1 - 2006/6/20
N2 - ZrN/TiN nanostructures with bilayer period of 50 nm were deposited on different substrates (Si and high speed steel) by pulsed reactive magnetron sputtering (RPMS) and radiofrequency beam assisted pulsed laser deposition (RF-PLD). Elemental composition, phase composition texture, roughness, microhardness, bilayer period, thickness and adhesion were determined using Auger Electron Spectroscopy (AES), X-ray diffraction (XRD) and Atomic Force Microscopy (AFM) techniques, Vickers microhardness measurements and scratch test. Compared to ZrN/TiN nanostructures deposited by RF-PLD, the coatings deposited by PRMS exhibit higher microhardness and smaller surface roughness. No matter the deposition method, ZrN and TiN monolayers were almost stoichiometric (N / Zr = 0.9, N / Ti = 1.1). The TiN/ZrN and ZrN/TiN multilayers with bilayer period of 32 nm were the hardest (≈ 32 and 30 GPa) and exhibited the smallest roughness.
AB - ZrN/TiN nanostructures with bilayer period of 50 nm were deposited on different substrates (Si and high speed steel) by pulsed reactive magnetron sputtering (RPMS) and radiofrequency beam assisted pulsed laser deposition (RF-PLD). Elemental composition, phase composition texture, roughness, microhardness, bilayer period, thickness and adhesion were determined using Auger Electron Spectroscopy (AES), X-ray diffraction (XRD) and Atomic Force Microscopy (AFM) techniques, Vickers microhardness measurements and scratch test. Compared to ZrN/TiN nanostructures deposited by RF-PLD, the coatings deposited by PRMS exhibit higher microhardness and smaller surface roughness. No matter the deposition method, ZrN and TiN monolayers were almost stoichiometric (N / Zr = 0.9, N / Ti = 1.1). The TiN/ZrN and ZrN/TiN multilayers with bilayer period of 32 nm were the hardest (≈ 32 and 30 GPa) and exhibited the smallest roughness.
KW - Heterostructures
KW - Nanostructured coatings
KW - Physical, Microchemical and Mechanical properties
KW - ZrN/TiN
UR - http://www.scopus.com/inward/record.url?scp=33748153295&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=33748153295&partnerID=8YFLogxK
U2 - 10.1016/j.surfcoat.2005.11.057
DO - 10.1016/j.surfcoat.2005.11.057
M3 - Article
VL - 200
SP - 6505
EP - 6510
JO - Surface and Coatings Technology
JF - Surface and Coatings Technology
SN - 0257-8972
IS - 22-23 SPEC. ISS.
ER -