TiN/ZrN heterostructures deposition and characterisation

Abstract

ZrN/TiN nanostructures with bilayer period of 50 nm were deposited on different substrates (Si and high speed steel) by pulsed reactive magnetron sputtering (RPMS) and radiofrequency beam assisted pulsed laser deposition (RF-PLD). Elemental composition, phase composition texture, roughness, microhardness, bilayer period, thickness and adhesion were determined using Auger Electron Spectroscopy (AES), X-ray diffraction (XRD) and Atomic Force Microscopy (AFM) techniques, Vickers microhardness measurements and scratch test. Compared to ZrN/TiN nanostructures deposited by RF-PLD, the coatings deposited by PRMS exhibit higher microhardness and smaller surface roughness. No matter the deposition method, ZrN and TiN monolayers were almost stoichiometric (N / Zr = 0.9, N / Ti = 1.1). The TiN/ZrN and ZrN/TiN multilayers with bilayer period of 32 nm were the hardest (≈ 32 and 30 GPa) and exhibited the smallest roughness.

Original language	English
Pages (from-to)	6505-6510
Number of pages	6
Journal	Surface and Coatings Technology
Volume	200
Issue number	22-23 SPEC. ISS.
DOIs	https://doi.org/10.1016/j.surfcoat.2005.11.057
Publication status	Published - 20 Jun 2006
Externally published	Yes

Keywords

Heterostructures
Nanostructured coatings
Physical, Microchemical and Mechanical properties
ZrN/TiN

ASJC Scopus subject areas

Chemistry(all)
Condensed Matter Physics
Surfaces and Interfaces
Surfaces, Coatings and Films
Materials Chemistry

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10.1016/j.surfcoat.2005.11.057

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TiN/ZrN heterostructures deposition and characterisation. / Braic, M.; Balaceanu, M.; Vladescu, A.; Kiss, A.; Braic, V.; Purice, A.; Dinescu, G.; Scarisoreanu, N.; Stokker-Cheregi, F.; Moldovan, A.; Birjega, R.; Dinescu, M.

In: Surface and Coatings Technology, Vol. 200, No. 22-23 SPEC. ISS., 20.06.2006, p. 6505-6510.

Research output: Contribution to journal › Article › peer-review

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title = "TiN/ZrN heterostructures deposition and characterisation",

abstract = "ZrN/TiN nanostructures with bilayer period of 50 nm were deposited on different substrates (Si and high speed steel) by pulsed reactive magnetron sputtering (RPMS) and radiofrequency beam assisted pulsed laser deposition (RF-PLD). Elemental composition, phase composition texture, roughness, microhardness, bilayer period, thickness and adhesion were determined using Auger Electron Spectroscopy (AES), X-ray diffraction (XRD) and Atomic Force Microscopy (AFM) techniques, Vickers microhardness measurements and scratch test. Compared to ZrN/TiN nanostructures deposited by RF-PLD, the coatings deposited by PRMS exhibit higher microhardness and smaller surface roughness. No matter the deposition method, ZrN and TiN monolayers were almost stoichiometric (N / Zr = 0.9, N / Ti = 1.1). The TiN/ZrN and ZrN/TiN multilayers with bilayer period of 32 nm were the hardest (≈ 32 and 30 GPa) and exhibited the smallest roughness.",

keywords = "Heterostructures, Nanostructured coatings, Physical, Microchemical and Mechanical properties, ZrN/TiN",

author = "M. Braic and M. Balaceanu and A. Vladescu and A. Kiss and V. Braic and A. Purice and G. Dinescu and N. Scarisoreanu and F. Stokker-Cheregi and A. Moldovan and R. Birjega and M. Dinescu",

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AU - Braic, M.

AU - Balaceanu, M.

AU - Vladescu, A.

AU - Kiss, A.

AU - Braic, V.

AU - Purice, A.

AU - Dinescu, G.

AU - Scarisoreanu, N.

AU - Stokker-Cheregi, F.

AU - Moldovan, A.

AU - Birjega, R.

AU - Dinescu, M.

PY - 2006/6/20

Y1 - 2006/6/20

N2 - ZrN/TiN nanostructures with bilayer period of 50 nm were deposited on different substrates (Si and high speed steel) by pulsed reactive magnetron sputtering (RPMS) and radiofrequency beam assisted pulsed laser deposition (RF-PLD). Elemental composition, phase composition texture, roughness, microhardness, bilayer period, thickness and adhesion were determined using Auger Electron Spectroscopy (AES), X-ray diffraction (XRD) and Atomic Force Microscopy (AFM) techniques, Vickers microhardness measurements and scratch test. Compared to ZrN/TiN nanostructures deposited by RF-PLD, the coatings deposited by PRMS exhibit higher microhardness and smaller surface roughness. No matter the deposition method, ZrN and TiN monolayers were almost stoichiometric (N / Zr = 0.9, N / Ti = 1.1). The TiN/ZrN and ZrN/TiN multilayers with bilayer period of 32 nm were the hardest (≈ 32 and 30 GPa) and exhibited the smallest roughness.

AB - ZrN/TiN nanostructures with bilayer period of 50 nm were deposited on different substrates (Si and high speed steel) by pulsed reactive magnetron sputtering (RPMS) and radiofrequency beam assisted pulsed laser deposition (RF-PLD). Elemental composition, phase composition texture, roughness, microhardness, bilayer period, thickness and adhesion were determined using Auger Electron Spectroscopy (AES), X-ray diffraction (XRD) and Atomic Force Microscopy (AFM) techniques, Vickers microhardness measurements and scratch test. Compared to ZrN/TiN nanostructures deposited by RF-PLD, the coatings deposited by PRMS exhibit higher microhardness and smaller surface roughness. No matter the deposition method, ZrN and TiN monolayers were almost stoichiometric (N / Zr = 0.9, N / Ti = 1.1). The TiN/ZrN and ZrN/TiN multilayers with bilayer period of 32 nm were the hardest (≈ 32 and 30 GPa) and exhibited the smallest roughness.

KW - Heterostructures

KW - Nanostructured coatings

KW - Physical, Microchemical and Mechanical properties

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