TiN/ZrN heterostructures deposition and characterisation

M. Braic, M. Balaceanu, A. Vladescu, A. Kiss, V. Braic, A. Purice, G. Dinescu, N. Scarisoreanu, F. Stokker-Cheregi, A. Moldovan, R. Birjega, M. Dinescu

Research output: Contribution to journalArticle

25 Citations (Scopus)

Abstract

ZrN/TiN nanostructures with bilayer period of 50 nm were deposited on different substrates (Si and high speed steel) by pulsed reactive magnetron sputtering (RPMS) and radiofrequency beam assisted pulsed laser deposition (RF-PLD). Elemental composition, phase composition texture, roughness, microhardness, bilayer period, thickness and adhesion were determined using Auger Electron Spectroscopy (AES), X-ray diffraction (XRD) and Atomic Force Microscopy (AFM) techniques, Vickers microhardness measurements and scratch test. Compared to ZrN/TiN nanostructures deposited by RF-PLD, the coatings deposited by PRMS exhibit higher microhardness and smaller surface roughness. No matter the deposition method, ZrN and TiN monolayers were almost stoichiometric (N / Zr = 0.9, N / Ti = 1.1). The TiN/ZrN and ZrN/TiN multilayers with bilayer period of 32 nm were the hardest (≈ 32 and 30 GPa) and exhibited the smallest roughness.

Original languageEnglish
Pages (from-to)6505-6510
Number of pages6
JournalSurface and Coatings Technology
Volume200
Issue number22-23 SPEC. ISS.
DOIs
Publication statusPublished - 20 Jun 2006
Externally publishedYes

Fingerprint

Microhardness
microhardness
Heterojunctions
Surface roughness
Pulsed laser deposition
pulsed laser deposition
Nanostructures
roughness
Steel
Reactive sputtering
Auger electron spectroscopy
Phase composition
Magnetron sputtering
Auger spectroscopy
electron spectroscopy
Monolayers
Atomic force microscopy
magnetron sputtering
Multilayers
surface roughness

Keywords

  • Heterostructures
  • Nanostructured coatings
  • Physical, Microchemical and Mechanical properties
  • ZrN/TiN

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry

Cite this

Braic, M., Balaceanu, M., Vladescu, A., Kiss, A., Braic, V., Purice, A., ... Dinescu, M. (2006). TiN/ZrN heterostructures deposition and characterisation. Surface and Coatings Technology, 200(22-23 SPEC. ISS.), 6505-6510. https://doi.org/10.1016/j.surfcoat.2005.11.057

TiN/ZrN heterostructures deposition and characterisation. / Braic, M.; Balaceanu, M.; Vladescu, A.; Kiss, A.; Braic, V.; Purice, A.; Dinescu, G.; Scarisoreanu, N.; Stokker-Cheregi, F.; Moldovan, A.; Birjega, R.; Dinescu, M.

In: Surface and Coatings Technology, Vol. 200, No. 22-23 SPEC. ISS., 20.06.2006, p. 6505-6510.

Research output: Contribution to journalArticle

Braic, M, Balaceanu, M, Vladescu, A, Kiss, A, Braic, V, Purice, A, Dinescu, G, Scarisoreanu, N, Stokker-Cheregi, F, Moldovan, A, Birjega, R & Dinescu, M 2006, 'TiN/ZrN heterostructures deposition and characterisation', Surface and Coatings Technology, vol. 200, no. 22-23 SPEC. ISS., pp. 6505-6510. https://doi.org/10.1016/j.surfcoat.2005.11.057
Braic M, Balaceanu M, Vladescu A, Kiss A, Braic V, Purice A et al. TiN/ZrN heterostructures deposition and characterisation. Surface and Coatings Technology. 2006 Jun 20;200(22-23 SPEC. ISS.):6505-6510. https://doi.org/10.1016/j.surfcoat.2005.11.057
Braic, M. ; Balaceanu, M. ; Vladescu, A. ; Kiss, A. ; Braic, V. ; Purice, A. ; Dinescu, G. ; Scarisoreanu, N. ; Stokker-Cheregi, F. ; Moldovan, A. ; Birjega, R. ; Dinescu, M. / TiN/ZrN heterostructures deposition and characterisation. In: Surface and Coatings Technology. 2006 ; Vol. 200, No. 22-23 SPEC. ISS. pp. 6505-6510.
@article{e4e465ba00944a6d87d1efc0a01a70b4,
title = "TiN/ZrN heterostructures deposition and characterisation",
abstract = "ZrN/TiN nanostructures with bilayer period of 50 nm were deposited on different substrates (Si and high speed steel) by pulsed reactive magnetron sputtering (RPMS) and radiofrequency beam assisted pulsed laser deposition (RF-PLD). Elemental composition, phase composition texture, roughness, microhardness, bilayer period, thickness and adhesion were determined using Auger Electron Spectroscopy (AES), X-ray diffraction (XRD) and Atomic Force Microscopy (AFM) techniques, Vickers microhardness measurements and scratch test. Compared to ZrN/TiN nanostructures deposited by RF-PLD, the coatings deposited by PRMS exhibit higher microhardness and smaller surface roughness. No matter the deposition method, ZrN and TiN monolayers were almost stoichiometric (N / Zr = 0.9, N / Ti = 1.1). The TiN/ZrN and ZrN/TiN multilayers with bilayer period of 32 nm were the hardest (≈ 32 and 30 GPa) and exhibited the smallest roughness.",
keywords = "Heterostructures, Nanostructured coatings, Physical, Microchemical and Mechanical properties, ZrN/TiN",
author = "M. Braic and M. Balaceanu and A. Vladescu and A. Kiss and V. Braic and A. Purice and G. Dinescu and N. Scarisoreanu and F. Stokker-Cheregi and A. Moldovan and R. Birjega and M. Dinescu",
year = "2006",
month = "6",
day = "20",
doi = "10.1016/j.surfcoat.2005.11.057",
language = "English",
volume = "200",
pages = "6505--6510",
journal = "Surface and Coatings Technology",
issn = "0257-8972",
publisher = "Elsevier",
number = "22-23 SPEC. ISS.",

}

TY - JOUR

T1 - TiN/ZrN heterostructures deposition and characterisation

AU - Braic, M.

AU - Balaceanu, M.

AU - Vladescu, A.

AU - Kiss, A.

AU - Braic, V.

AU - Purice, A.

AU - Dinescu, G.

AU - Scarisoreanu, N.

AU - Stokker-Cheregi, F.

AU - Moldovan, A.

AU - Birjega, R.

AU - Dinescu, M.

PY - 2006/6/20

Y1 - 2006/6/20

N2 - ZrN/TiN nanostructures with bilayer period of 50 nm were deposited on different substrates (Si and high speed steel) by pulsed reactive magnetron sputtering (RPMS) and radiofrequency beam assisted pulsed laser deposition (RF-PLD). Elemental composition, phase composition texture, roughness, microhardness, bilayer period, thickness and adhesion were determined using Auger Electron Spectroscopy (AES), X-ray diffraction (XRD) and Atomic Force Microscopy (AFM) techniques, Vickers microhardness measurements and scratch test. Compared to ZrN/TiN nanostructures deposited by RF-PLD, the coatings deposited by PRMS exhibit higher microhardness and smaller surface roughness. No matter the deposition method, ZrN and TiN monolayers were almost stoichiometric (N / Zr = 0.9, N / Ti = 1.1). The TiN/ZrN and ZrN/TiN multilayers with bilayer period of 32 nm were the hardest (≈ 32 and 30 GPa) and exhibited the smallest roughness.

AB - ZrN/TiN nanostructures with bilayer period of 50 nm were deposited on different substrates (Si and high speed steel) by pulsed reactive magnetron sputtering (RPMS) and radiofrequency beam assisted pulsed laser deposition (RF-PLD). Elemental composition, phase composition texture, roughness, microhardness, bilayer period, thickness and adhesion were determined using Auger Electron Spectroscopy (AES), X-ray diffraction (XRD) and Atomic Force Microscopy (AFM) techniques, Vickers microhardness measurements and scratch test. Compared to ZrN/TiN nanostructures deposited by RF-PLD, the coatings deposited by PRMS exhibit higher microhardness and smaller surface roughness. No matter the deposition method, ZrN and TiN monolayers were almost stoichiometric (N / Zr = 0.9, N / Ti = 1.1). The TiN/ZrN and ZrN/TiN multilayers with bilayer period of 32 nm were the hardest (≈ 32 and 30 GPa) and exhibited the smallest roughness.

KW - Heterostructures

KW - Nanostructured coatings

KW - Physical, Microchemical and Mechanical properties

KW - ZrN/TiN

UR - http://www.scopus.com/inward/record.url?scp=33748153295&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=33748153295&partnerID=8YFLogxK

U2 - 10.1016/j.surfcoat.2005.11.057

DO - 10.1016/j.surfcoat.2005.11.057

M3 - Article

VL - 200

SP - 6505

EP - 6510

JO - Surface and Coatings Technology

JF - Surface and Coatings Technology

SN - 0257-8972

IS - 22-23 SPEC. ISS.

ER -