Three-dimensional reciprocal space mapping of diffuse scattering for the study of stacking faults in semipolar (112 2) GaN layers grown from the sidewall of an r-patterned sapphire substrate

Sergey Lazarev, Sondes Bauer, Tobias Meisch, Martin Bauer, Ingo Tischer, Mykhailo Barchuk, Klaus Thonke, Vaclav Holy, Ferdinand Scholz, Tilo Baumbach

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