Three-axis MEMS accelerometer for structural inspection

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Abstract

Microelectromechanical system accelerometers are widely used for metrological measurements of acceleration, tilt, vibration, and shock in moving objects. The paper presents the analysis of MEMS accelerometer that can be used for the structural inspection. ANSYS Multiphysics platform is used to simulate the behavior of MEMS accelerometer by employing a finite element model and MATLAB/Simulink tools for modeling nonlinear dynamic systems.

Original languageEnglish
Article number012003
JournalJournal of Physics: Conference Series
Volume671
Issue number1
DOIs
Publication statusPublished - 18 Jan 2016
Event3rd All-Russian Scientific and Practical Conference on Innovations in Non-Destructive Testing, SibTest 2015 - Altai, Russian Federation
Duration: 27 Jul 201531 Jul 2015

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ASJC Scopus subject areas

  • Physics and Astronomy(all)

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