Microelectromechanical system accelerometers are widely used for metrological measurements of acceleration, tilt, vibration, and shock in moving objects. The paper presents the analysis of MEMS accelerometer that can be used for the structural inspection. ANSYS Multiphysics platform is used to simulate the behavior of MEMS accelerometer by employing a finite element model and MATLAB/Simulink tools for modeling nonlinear dynamic systems.
|Journal||Journal of Physics: Conference Series|
|Publication status||Published - 18 Jan 2016|
|Event||3rd All-Russian Scientific and Practical Conference on Innovations in Non-Destructive Testing, SibTest 2015 - Altai, Russian Federation|
Duration: 27 Jul 2015 → 31 Jul 2015
ASJC Scopus subject areas
- Physics and Astronomy(all)