Thermal stability of nanocrystalline (Ti,Zr)0.54Al0.46N films implanted by He+ ions

V. V. Uglov, G. Abadias, A. Y. Rovbut, S. V. Zlotski, I. A. Saladukhin, V. A. Skuratov, S. Petrovich

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2 Citations (Scopus)

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Engineering & Materials Science

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