Thermal stability of anti-reflective and protective a-C:H:SiOx coating for infrared optics

A. S. Grenadyorov, A. A. Solovyev, K. V. Oskomov, V. O. Oskirko, V. A. Semenov

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)


Poor mechanical and wear-resistant properties is the main weakness of infrared multi-layer anti-reflective optical coatings. The paper deals with anti-reflective and protective coatings based on SiOx-doped amorphous hydrogenated carbon deposited on both sides of the polished single-crystalline silicon substrates. A method of plasma-enhanced chemical vapor deposition in a mixture of argon and polyphenylmethylsiloxane vapors is used for this coating. Anti-reflective properties of obtained coatings are studied by the Fourier-transform infrared spectroscopy. It is shown how the mechanical properties, chemical composition and wettability of the a-C:H:SiOx coating depend on annealing in air. It is found that the average infrared transmission of the silicon substrates with double-sided film deposition is 87% in a 3–5 µm wavelength span, while the maximum infrared transmission is about 90%. At the same time, the films have excellent mechanical properties, heat resistance to 500 °C, and chemical resistance to a sea salt solution. The obtained anti-reflective coating has a great potential to be used as an anti-reflective and protective coating for infrared optical silicon products.

Original languageEnglish
Article number145433
JournalApplied Surface Science
Publication statusPublished - 30 Apr 2020
Externally publishedYes


  • Anti-reflective coating
  • Mechanical properties
  • SiO-doped amorphous hydrogenated carbon
  • Thermal stability

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Physics and Astronomy(all)
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

Fingerprint Dive into the research topics of 'Thermal stability of anti-reflective and protective a-C:H:SiO<sub>x</sub> coating for infrared optics'. Together they form a unique fingerprint.

Cite this