Abstract
Mathematical models of thermal and erosion processes in the thermally insulated target of a magnetron sputtering system are constructed. With their help, the special features of forming the emission flux of atoms from the surface of the target whose material experiences first order phase transformations are obtained. The influence of the power density deposited into the magnetron discharge is investigated, the inhomogeneity of its distribution over the target surface is considered, and the special features of atom emission in pulsed-periodic plasma generation regimes are studied. The efficiency of the models is confirmed by a comparison of the calculated results with experimental measurements.
| Original language | English |
|---|---|
| Pages (from-to) | 431-437 |
| Number of pages | 7 |
| Journal | Russian Physics Journal |
| Volume | 58 |
| Issue number | 4 |
| DOIs | |
| Publication status | Published - 9 Aug 2015 |
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Keywords
- emission of atoms from the liquid phase
- evaporation
- magnetron sputtering system with a liquid-phase target
- sputtering
ASJC Scopus subject areas
- Physics and Astronomy(all)
Cite this
Thermal Processes and Emission of Atoms from the Liquid Phase Target Surface of a Magnetron Sputtering System. / Bleykher, G. A.; Krivobokov, V. P.; Yuryeva, Alena Victorovna.
In: Russian Physics Journal, Vol. 58, No. 4, 09.08.2015, p. 431-437.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Thermal Processes and Emission of Atoms from the Liquid Phase Target Surface of a Magnetron Sputtering System
AU - Bleykher, G. A.
AU - Krivobokov, V. P.
AU - Yuryeva, Alena Victorovna
PY - 2015/8/9
Y1 - 2015/8/9
N2 - Mathematical models of thermal and erosion processes in the thermally insulated target of a magnetron sputtering system are constructed. With their help, the special features of forming the emission flux of atoms from the surface of the target whose material experiences first order phase transformations are obtained. The influence of the power density deposited into the magnetron discharge is investigated, the inhomogeneity of its distribution over the target surface is considered, and the special features of atom emission in pulsed-periodic plasma generation regimes are studied. The efficiency of the models is confirmed by a comparison of the calculated results with experimental measurements.
AB - Mathematical models of thermal and erosion processes in the thermally insulated target of a magnetron sputtering system are constructed. With their help, the special features of forming the emission flux of atoms from the surface of the target whose material experiences first order phase transformations are obtained. The influence of the power density deposited into the magnetron discharge is investigated, the inhomogeneity of its distribution over the target surface is considered, and the special features of atom emission in pulsed-periodic plasma generation regimes are studied. The efficiency of the models is confirmed by a comparison of the calculated results with experimental measurements.
KW - emission of atoms from the liquid phase
KW - evaporation
KW - magnetron sputtering system with a liquid-phase target
KW - sputtering
UR - http://www.scopus.com/inward/record.url?scp=84945474953&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84945474953&partnerID=8YFLogxK
U2 - 10.1007/s11182-015-0517-6
DO - 10.1007/s11182-015-0517-6
M3 - Article
VL - 58
SP - 431
EP - 437
JO - Russian Physics Journal
JF - Russian Physics Journal
SN - 1064-8887
IS - 4
ER -