Thermal Processes and Emission of Atoms from the Liquid Phase Target Surface of a Magnetron Sputtering System

Abstract

Mathematical models of thermal and erosion processes in the thermally insulated target of a magnetron sputtering system are constructed. With their help, the special features of forming the emission flux of atoms from the surface of the target whose material experiences first order phase transformations are obtained. The influence of the power density deposited into the magnetron discharge is investigated, the inhomogeneity of its distribution over the target surface is considered, and the special features of atom emission in pulsed-periodic plasma generation regimes are studied. The efficiency of the models is confirmed by a comparison of the calculated results with experimental measurements.

Original language	English
Pages (from-to)	431-437
Number of pages	7
Journal	Russian Physics Journal
Volume	58
Issue number	4
DOIs	https://doi.org/10.1007/s11182-015-0517-6
Publication status	Published - 9 Aug 2015

Keywords

emission of atoms from the liquid phase
evaporation
magnetron sputtering system with a liquid-phase target
sputtering

ASJC Scopus subject areas

Physics and Astronomy(all)

Access to Document

10.1007/s11182-015-0517-6

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title = "Thermal Processes and Emission of Atoms from the Liquid Phase Target Surface of a Magnetron Sputtering System",

abstract = "Mathematical models of thermal and erosion processes in the thermally insulated target of a magnetron sputtering system are constructed. With their help, the special features of forming the emission flux of atoms from the surface of the target whose material experiences first order phase transformations are obtained. The influence of the power density deposited into the magnetron discharge is investigated, the inhomogeneity of its distribution over the target surface is considered, and the special features of atom emission in pulsed-periodic plasma generation regimes are studied. The efficiency of the models is confirmed by a comparison of the calculated results with experimental measurements.",

keywords = "emission of atoms from the liquid phase, evaporation, magnetron sputtering system with a liquid-phase target, sputtering",

author = "Bleykher, {G. A.} and Krivobokov, {V. P.} and Yuryeva, {Alena Victorovna}",

year = "2015",

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doi = "10.1007/s11182-015-0517-6",

language = "English",

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journal = "Russian Physics Journal",

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T1 - Thermal Processes and Emission of Atoms from the Liquid Phase Target Surface of a Magnetron Sputtering System

AU - Bleykher, G. A.

AU - Krivobokov, V. P.

AU - Yuryeva, Alena Victorovna

PY - 2015/8/9

Y1 - 2015/8/9

N2 - Mathematical models of thermal and erosion processes in the thermally insulated target of a magnetron sputtering system are constructed. With their help, the special features of forming the emission flux of atoms from the surface of the target whose material experiences first order phase transformations are obtained. The influence of the power density deposited into the magnetron discharge is investigated, the inhomogeneity of its distribution over the target surface is considered, and the special features of atom emission in pulsed-periodic plasma generation regimes are studied. The efficiency of the models is confirmed by a comparison of the calculated results with experimental measurements.

AB - Mathematical models of thermal and erosion processes in the thermally insulated target of a magnetron sputtering system are constructed. With their help, the special features of forming the emission flux of atoms from the surface of the target whose material experiences first order phase transformations are obtained. The influence of the power density deposited into the magnetron discharge is investigated, the inhomogeneity of its distribution over the target surface is considered, and the special features of atom emission in pulsed-periodic plasma generation regimes are studied. The efficiency of the models is confirmed by a comparison of the calculated results with experimental measurements.

KW - emission of atoms from the liquid phase

KW - evaporation

KW - magnetron sputtering system with a liquid-phase target

KW - sputtering

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DO - 10.1007/s11182-015-0517-6

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