Thermal Processes and Emission of Atoms from the Liquid Phase Target Surface of a Magnetron Sputtering System

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Abstract

Mathematical models of thermal and erosion processes in the thermally insulated target of a magnetron sputtering system are constructed. With their help, the special features of forming the emission flux of atoms from the surface of the target whose material experiences first order phase transformations are obtained. The influence of the power density deposited into the magnetron discharge is investigated, the inhomogeneity of its distribution over the target surface is considered, and the special features of atom emission in pulsed-periodic plasma generation regimes are studied. The efficiency of the models is confirmed by a comparison of the calculated results with experimental measurements.

Original languageEnglish
Pages (from-to)431-437
Number of pages7
JournalRussian Physics Journal
Volume58
Issue number4
DOIs
Publication statusPublished - 9 Aug 2015

Fingerprint

magnetron sputtering
liquid phases
atoms
plasma generators
erosion
phase transformations
radiant flux density
mathematical models
inhomogeneity

Keywords

  • emission of atoms from the liquid phase
  • evaporation
  • magnetron sputtering system with a liquid-phase target
  • sputtering

ASJC Scopus subject areas

  • Physics and Astronomy(all)

Cite this

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title = "Thermal Processes and Emission of Atoms from the Liquid Phase Target Surface of a Magnetron Sputtering System",
abstract = "Mathematical models of thermal and erosion processes in the thermally insulated target of a magnetron sputtering system are constructed. With their help, the special features of forming the emission flux of atoms from the surface of the target whose material experiences first order phase transformations are obtained. The influence of the power density deposited into the magnetron discharge is investigated, the inhomogeneity of its distribution over the target surface is considered, and the special features of atom emission in pulsed-periodic plasma generation regimes are studied. The efficiency of the models is confirmed by a comparison of the calculated results with experimental measurements.",
keywords = "emission of atoms from the liquid phase, evaporation, magnetron sputtering system with a liquid-phase target, sputtering",
author = "Bleykher, {G. A.} and Krivobokov, {V. P.} and Yuryeva, {Alena Victorovna}",
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T1 - Thermal Processes and Emission of Atoms from the Liquid Phase Target Surface of a Magnetron Sputtering System

AU - Bleykher, G. A.

AU - Krivobokov, V. P.

AU - Yuryeva, Alena Victorovna

PY - 2015/8/9

Y1 - 2015/8/9

N2 - Mathematical models of thermal and erosion processes in the thermally insulated target of a magnetron sputtering system are constructed. With their help, the special features of forming the emission flux of atoms from the surface of the target whose material experiences first order phase transformations are obtained. The influence of the power density deposited into the magnetron discharge is investigated, the inhomogeneity of its distribution over the target surface is considered, and the special features of atom emission in pulsed-periodic plasma generation regimes are studied. The efficiency of the models is confirmed by a comparison of the calculated results with experimental measurements.

AB - Mathematical models of thermal and erosion processes in the thermally insulated target of a magnetron sputtering system are constructed. With their help, the special features of forming the emission flux of atoms from the surface of the target whose material experiences first order phase transformations are obtained. The influence of the power density deposited into the magnetron discharge is investigated, the inhomogeneity of its distribution over the target surface is considered, and the special features of atom emission in pulsed-periodic plasma generation regimes are studied. The efficiency of the models is confirmed by a comparison of the calculated results with experimental measurements.

KW - emission of atoms from the liquid phase

KW - evaporation

KW - magnetron sputtering system with a liquid-phase target

KW - sputtering

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